JPS4872971A - - Google Patents

Info

Publication number
JPS4872971A
JPS4872971A JP234572A JP234572A JPS4872971A JP S4872971 A JPS4872971 A JP S4872971A JP 234572 A JP234572 A JP 234572A JP 234572 A JP234572 A JP 234572A JP S4872971 A JPS4872971 A JP S4872971A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP234572A
Other languages
Japanese (ja)
Other versions
JPS5547952B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP234572A priority Critical patent/JPS5547952B2/ja
Publication of JPS4872971A publication Critical patent/JPS4872971A/ja
Publication of JPS5547952B2 publication Critical patent/JPS5547952B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP234572A 1971-12-29 1971-12-29 Expired JPS5547952B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP234572A JPS5547952B2 (enrdf_load_stackoverflow) 1971-12-29 1971-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP234572A JPS5547952B2 (enrdf_load_stackoverflow) 1971-12-29 1971-12-29

Publications (2)

Publication Number Publication Date
JPS4872971A true JPS4872971A (enrdf_load_stackoverflow) 1973-10-02
JPS5547952B2 JPS5547952B2 (enrdf_load_stackoverflow) 1980-12-03

Family

ID=11526681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP234572A Expired JPS5547952B2 (enrdf_load_stackoverflow) 1971-12-29 1971-12-29

Country Status (1)

Country Link
JP (1) JPS5547952B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139366A (en) * 1976-05-14 1977-11-21 Deetaa Gen Corp Method of forming interface between metal and semiconductor
JPS5459081A (en) * 1977-10-20 1979-05-12 Toshiba Corp Surface treatment method for semiconductor element
JPS61284925A (ja) * 1985-06-10 1986-12-15 Sony Corp 半導体装置の製造方法
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6355113B1 (en) 1991-12-02 2002-03-12 3M Innovative Properties Company Multiple solvent cleaning system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139366A (en) * 1976-05-14 1977-11-21 Deetaa Gen Corp Method of forming interface between metal and semiconductor
JPS5459081A (en) * 1977-10-20 1979-05-12 Toshiba Corp Surface treatment method for semiconductor element
JPS61284925A (ja) * 1985-06-10 1986-12-15 Sony Corp 半導体装置の製造方法
WO2002047142A1 (en) * 2000-12-05 2002-06-13 Tokyo Electron Limited Method and apparatus for treating article to be treated
US7208428B2 (en) 2000-12-05 2007-04-24 Tokyo Electron Limited Method and apparatus for treating article to be treated

Also Published As

Publication number Publication date
JPS5547952B2 (enrdf_load_stackoverflow) 1980-12-03

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