JPS5546640B2 - - Google Patents

Info

Publication number
JPS5546640B2
JPS5546640B2 JP8172076A JP8172076A JPS5546640B2 JP S5546640 B2 JPS5546640 B2 JP S5546640B2 JP 8172076 A JP8172076 A JP 8172076A JP 8172076 A JP8172076 A JP 8172076A JP S5546640 B2 JPS5546640 B2 JP S5546640B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8172076A
Other languages
Japanese (ja)
Other versions
JPS537199A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8172076A priority Critical patent/JPS537199A/ja
Publication of JPS537199A publication Critical patent/JPS537199A/ja
Publication of JPS5546640B2 publication Critical patent/JPS5546640B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8172076A 1976-07-09 1976-07-09 Plasma generator Granted JPS537199A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8172076A JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8172076A JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Publications (2)

Publication Number Publication Date
JPS537199A JPS537199A (en) 1978-01-23
JPS5546640B2 true JPS5546640B2 (zh) 1980-11-25

Family

ID=13754240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8172076A Granted JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Country Status (1)

Country Link
JP (1) JPS537199A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
JP2675561B2 (ja) * 1987-12-18 1997-11-12 株式会社日立製作所 プラズマ微量元素分折装置
JP2805009B2 (ja) * 1988-05-11 1998-09-30 株式会社日立製作所 プラズマ発生装置及びプラズマ元素分析装置
JP2787006B2 (ja) * 1995-05-10 1998-08-13 株式会社日立製作所 加工方法及び加工装置並びにプラズマ光源
JP3866590B2 (ja) * 2002-03-08 2007-01-10 芝浦メカトロニクス株式会社 プラズマ発生装置

Also Published As

Publication number Publication date
JPS537199A (en) 1978-01-23

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