JPS5546640B2 - - Google Patents
Info
- Publication number
- JPS5546640B2 JPS5546640B2 JP8172076A JP8172076A JPS5546640B2 JP S5546640 B2 JPS5546640 B2 JP S5546640B2 JP 8172076 A JP8172076 A JP 8172076A JP 8172076 A JP8172076 A JP 8172076A JP S5546640 B2 JPS5546640 B2 JP S5546640B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8172076A JPS537199A (en) | 1976-07-09 | 1976-07-09 | Plasma generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8172076A JPS537199A (en) | 1976-07-09 | 1976-07-09 | Plasma generator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS537199A JPS537199A (en) | 1978-01-23 |
JPS5546640B2 true JPS5546640B2 (zh) | 1980-11-25 |
Family
ID=13754240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8172076A Granted JPS537199A (en) | 1976-07-09 | 1976-07-09 | Plasma generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS537199A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2475798A1 (fr) * | 1980-02-13 | 1981-08-14 | Commissariat Energie Atomique | Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede |
JP2675561B2 (ja) * | 1987-12-18 | 1997-11-12 | 株式会社日立製作所 | プラズマ微量元素分折装置 |
JP2805009B2 (ja) * | 1988-05-11 | 1998-09-30 | 株式会社日立製作所 | プラズマ発生装置及びプラズマ元素分析装置 |
JP2787006B2 (ja) * | 1995-05-10 | 1998-08-13 | 株式会社日立製作所 | 加工方法及び加工装置並びにプラズマ光源 |
JP3866590B2 (ja) * | 2002-03-08 | 2007-01-10 | 芝浦メカトロニクス株式会社 | プラズマ発生装置 |
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1976
- 1976-07-09 JP JP8172076A patent/JPS537199A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS537199A (en) | 1978-01-23 |