JPS537199A - Plasma generator - Google Patents

Plasma generator

Info

Publication number
JPS537199A
JPS537199A JP8172076A JP8172076A JPS537199A JP S537199 A JPS537199 A JP S537199A JP 8172076 A JP8172076 A JP 8172076A JP 8172076 A JP8172076 A JP 8172076A JP S537199 A JPS537199 A JP S537199A
Authority
JP
Japan
Prior art keywords
plasma generator
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8172076A
Other languages
Japanese (ja)
Other versions
JPS5546640B2 (en
Inventor
Moritake Tanba
Yuuichi Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP8172076A priority Critical patent/JPS537199A/en
Publication of JPS537199A publication Critical patent/JPS537199A/en
Publication of JPS5546640B2 publication Critical patent/JPS5546640B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8172076A 1976-07-09 1976-07-09 Plasma generator Granted JPS537199A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8172076A JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8172076A JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Publications (2)

Publication Number Publication Date
JPS537199A true JPS537199A (en) 1978-01-23
JPS5546640B2 JPS5546640B2 (en) 1980-11-25

Family

ID=13754240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8172076A Granted JPS537199A (en) 1976-07-09 1976-07-09 Plasma generator

Country Status (1)

Country Link
JP (1) JPS537199A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128600A (en) * 1980-02-13 1981-10-08 Commissariat Energie Atomique Method and device for producing large ion highly charged and utility using same method
JPH01161651A (en) * 1987-12-18 1989-06-26 Hitachi Ltd Plasma small amount element analyzer
JPH01283745A (en) * 1988-05-11 1989-11-15 Hitachi Ltd Microwave exciting plasma generator
JPH088238A (en) * 1995-05-10 1996-01-12 Hitachi Ltd Machining method and device
JP2003264099A (en) * 2002-03-08 2003-09-19 Shibaura Mechatronics Corp Plasma generator

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128600A (en) * 1980-02-13 1981-10-08 Commissariat Energie Atomique Method and device for producing large ion highly charged and utility using same method
JPH0341934B2 (en) * 1980-02-13 1991-06-25
JPH01161651A (en) * 1987-12-18 1989-06-26 Hitachi Ltd Plasma small amount element analyzer
JPH01283745A (en) * 1988-05-11 1989-11-15 Hitachi Ltd Microwave exciting plasma generator
JPH088238A (en) * 1995-05-10 1996-01-12 Hitachi Ltd Machining method and device
JP2003264099A (en) * 2002-03-08 2003-09-19 Shibaura Mechatronics Corp Plasma generator

Also Published As

Publication number Publication date
JPS5546640B2 (en) 1980-11-25

Similar Documents

Publication Publication Date Title
JPS5333311A (en) Generator
GB1556335A (en) Reference potential generator
JPS52152188A (en) Electric generator
JPS52134952A (en) Generator
JPS5318996A (en) Selffcorrelative number generator
JPS52110399A (en) Ion generator
GB1556126A (en) Electrical generator
JPS52118145A (en) Generating set
JPS52122856A (en) Standard voltage generator
JPS5324796A (en) Xxray generator
JPS537199A (en) Plasma generator
JPS536804A (en) Generator
JPS52146295A (en) Standard gas generator
JPS5310023A (en) Ac generator
GB1540809A (en) Vapour generator
JPS52132752A (en) Multiple sequence generator
JPS53186A (en) Spanngas generator
JPS53104803A (en) Selffexciting generator
JPS5330248A (en) Function generator
JPS52147420A (en) Function generator
JPS5373310A (en) Brushless generator
JPS5320553A (en) Voltage generator
JPS52114243A (en) Function generator
JPS5348593A (en) Standard gas generator
JPS5359342A (en) Fanction generator