JPS5543247B2 - - Google Patents
Info
- Publication number
- JPS5543247B2 JPS5543247B2 JP10901576A JP10901576A JPS5543247B2 JP S5543247 B2 JPS5543247 B2 JP S5543247B2 JP 10901576 A JP10901576 A JP 10901576A JP 10901576 A JP10901576 A JP 10901576A JP S5543247 B2 JPS5543247 B2 JP S5543247B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10901576A JPS5334465A (en) | 1976-09-10 | 1976-09-10 | Manufacture for semiconductor epitaxial grown layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10901576A JPS5334465A (en) | 1976-09-10 | 1976-09-10 | Manufacture for semiconductor epitaxial grown layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5334465A JPS5334465A (en) | 1978-03-31 |
JPS5543247B2 true JPS5543247B2 (ja) | 1980-11-05 |
Family
ID=14499403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10901576A Granted JPS5334465A (en) | 1976-09-10 | 1976-09-10 | Manufacture for semiconductor epitaxial grown layer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5334465A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833702Y2 (ja) * | 1981-10-29 | 1983-07-28 | 日本電信電話株式会社 | 電子ビ−ム露光装置 |
JPH0763052B2 (ja) * | 1982-12-28 | 1995-07-05 | 松下電器産業株式会社 | 半導体結晶成長方法 |
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1976
- 1976-09-10 JP JP10901576A patent/JPS5334465A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5334465A (en) | 1978-03-31 |