JPS5542148B2 - - Google Patents

Info

Publication number
JPS5542148B2
JPS5542148B2 JP13884875A JP13884875A JPS5542148B2 JP S5542148 B2 JPS5542148 B2 JP S5542148B2 JP 13884875 A JP13884875 A JP 13884875A JP 13884875 A JP13884875 A JP 13884875A JP S5542148 B2 JPS5542148 B2 JP S5542148B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13884875A
Other languages
Japanese (ja)
Other versions
JPS5262138A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13884875A priority Critical patent/JPS5262138A/ja
Publication of JPS5262138A publication Critical patent/JPS5262138A/ja
Publication of JPS5542148B2 publication Critical patent/JPS5542148B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
JP13884875A 1975-11-18 1975-11-18 Vacuum deposition process Granted JPS5262138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13884875A JPS5262138A (en) 1975-11-18 1975-11-18 Vacuum deposition process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13884875A JPS5262138A (en) 1975-11-18 1975-11-18 Vacuum deposition process

Publications (2)

Publication Number Publication Date
JPS5262138A JPS5262138A (en) 1977-05-23
JPS5542148B2 true JPS5542148B2 (enrdf_load_stackoverflow) 1980-10-29

Family

ID=15231580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13884875A Granted JPS5262138A (en) 1975-11-18 1975-11-18 Vacuum deposition process

Country Status (1)

Country Link
JP (1) JPS5262138A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524985A (en) * 1978-08-14 1980-02-22 Matsushita Electric Ind Co Ltd Equipment for producing microparticle film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329232B2 (enrdf_load_stackoverflow) * 1973-08-16 1978-08-19

Also Published As

Publication number Publication date
JPS5262138A (en) 1977-05-23

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