JPS5262138A - Vacuum deposition process - Google Patents

Vacuum deposition process

Info

Publication number
JPS5262138A
JPS5262138A JP13884875A JP13884875A JPS5262138A JP S5262138 A JPS5262138 A JP S5262138A JP 13884875 A JP13884875 A JP 13884875A JP 13884875 A JP13884875 A JP 13884875A JP S5262138 A JPS5262138 A JP S5262138A
Authority
JP
Japan
Prior art keywords
deposition process
vacuum deposition
vacuum
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13884875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5542148B2 (enrdf_load_stackoverflow
Inventor
Keigi Soejima
Terushi Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP13884875A priority Critical patent/JPS5262138A/ja
Publication of JPS5262138A publication Critical patent/JPS5262138A/ja
Publication of JPS5542148B2 publication Critical patent/JPS5542148B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
JP13884875A 1975-11-18 1975-11-18 Vacuum deposition process Granted JPS5262138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13884875A JPS5262138A (en) 1975-11-18 1975-11-18 Vacuum deposition process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13884875A JPS5262138A (en) 1975-11-18 1975-11-18 Vacuum deposition process

Publications (2)

Publication Number Publication Date
JPS5262138A true JPS5262138A (en) 1977-05-23
JPS5542148B2 JPS5542148B2 (enrdf_load_stackoverflow) 1980-10-29

Family

ID=15231580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13884875A Granted JPS5262138A (en) 1975-11-18 1975-11-18 Vacuum deposition process

Country Status (1)

Country Link
JP (1) JPS5262138A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524985A (en) * 1978-08-14 1980-02-22 Matsushita Electric Ind Co Ltd Equipment for producing microparticle film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5041089A (enrdf_load_stackoverflow) * 1973-08-16 1975-04-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5041089A (enrdf_load_stackoverflow) * 1973-08-16 1975-04-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524985A (en) * 1978-08-14 1980-02-22 Matsushita Electric Ind Co Ltd Equipment for producing microparticle film

Also Published As

Publication number Publication date
JPS5542148B2 (enrdf_load_stackoverflow) 1980-10-29

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