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Sony Corp
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Sony Corp
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Application filed by Sony CorpfiledCriticalSony Corp
Priority to JP11489178ApriorityCriticalpatent/JPS5540986A/ja
Publication of JPS5540986ApublicationCriticalpatent/JPS5540986A/ja
Publication of JPS6222190B2publicationCriticalpatent/JPS6222190B2/ja
The Gaertner L 119 ellipsometer and its use in the measurement of thin films(Characteristics of ellipsometer and techniques for measuring thin films including computer program for determination of optical constants and thickness of film)