JPS5538049B2 - - Google Patents
Info
- Publication number
- JPS5538049B2 JPS5538049B2 JP15868476A JP15868476A JPS5538049B2 JP S5538049 B2 JPS5538049 B2 JP S5538049B2 JP 15868476 A JP15868476 A JP 15868476A JP 15868476 A JP15868476 A JP 15868476A JP S5538049 B2 JPS5538049 B2 JP S5538049B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15868476A JPS5382173A (en) | 1976-12-27 | 1976-12-27 | Positioning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15868476A JPS5382173A (en) | 1976-12-27 | 1976-12-27 | Positioning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5382173A JPS5382173A (en) | 1978-07-20 |
| JPS5538049B2 true JPS5538049B2 (ru) | 1980-10-02 |
Family
ID=15677090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15868476A Granted JPS5382173A (en) | 1976-12-27 | 1976-12-27 | Positioning method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5382173A (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6224259A (ja) * | 1985-03-15 | 1987-02-02 | Rohm Co Ltd | 手動による電子部品のマスク位置合せ方法 |
| JP2530950Y2 (ja) * | 1990-07-05 | 1997-04-02 | カシオ計算機株式会社 | 基板のアライメントパターン |
| JP5324206B2 (ja) * | 2008-12-18 | 2013-10-23 | 日本電信電話株式会社 | 位置合わせ方法、ホトマスクおよびウエハ |
-
1976
- 1976-12-27 JP JP15868476A patent/JPS5382173A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5382173A (en) | 1978-07-20 |