JPS5534575B2 - - Google Patents

Info

Publication number
JPS5534575B2
JPS5534575B2 JP12475975A JP12475975A JPS5534575B2 JP S5534575 B2 JPS5534575 B2 JP S5534575B2 JP 12475975 A JP12475975 A JP 12475975A JP 12475975 A JP12475975 A JP 12475975A JP S5534575 B2 JPS5534575 B2 JP S5534575B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12475975A
Other languages
Japanese (ja)
Other versions
JPS5248467A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50124759A priority Critical patent/JPS5248467A/ja
Publication of JPS5248467A publication Critical patent/JPS5248467A/ja
Publication of JPS5534575B2 publication Critical patent/JPS5534575B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Junction Field-Effect Transistors (AREA)
JP50124759A 1975-10-15 1975-10-15 Process for production of semiconductor device Granted JPS5248467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50124759A JPS5248467A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50124759A JPS5248467A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5248467A JPS5248467A (en) 1977-04-18
JPS5534575B2 true JPS5534575B2 (Direct) 1980-09-08

Family

ID=14893401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50124759A Granted JPS5248467A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5248467A (Direct)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586113A (en) * 1978-12-23 1980-06-28 Fujitsu Ltd Vapor phase growth process
JPS5635411A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Epitaxial wafer of gallium arsenide and its manufacture

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JAPANESE JOURNAL OF APPLIED PHYSICS#V10#M2=1971 *

Also Published As

Publication number Publication date
JPS5248467A (en) 1977-04-18

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