JPS5534228B2 - - Google Patents

Info

Publication number
JPS5534228B2
JPS5534228B2 JP7645678A JP7645678A JPS5534228B2 JP S5534228 B2 JPS5534228 B2 JP S5534228B2 JP 7645678 A JP7645678 A JP 7645678A JP 7645678 A JP7645678 A JP 7645678A JP S5534228 B2 JPS5534228 B2 JP S5534228B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7645678A
Other languages
Japanese (ja)
Other versions
JPS556407A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7645678A priority Critical patent/JPS556407A/ja
Publication of JPS556407A publication Critical patent/JPS556407A/ja
Publication of JPS5534228B2 publication Critical patent/JPS5534228B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP7645678A 1978-06-26 1978-06-26 Etching method for aluminum Granted JPS556407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7645678A JPS556407A (en) 1978-06-26 1978-06-26 Etching method for aluminum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7645678A JPS556407A (en) 1978-06-26 1978-06-26 Etching method for aluminum

Publications (2)

Publication Number Publication Date
JPS556407A JPS556407A (en) 1980-01-17
JPS5534228B2 true JPS5534228B2 (xx) 1980-09-05

Family

ID=13605648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7645678A Granted JPS556407A (en) 1978-06-26 1978-06-26 Etching method for aluminum

Country Status (1)

Country Link
JP (1) JPS556407A (xx)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129325A (en) * 1980-03-14 1981-10-09 Fujitsu Ltd Dry etching
JPS57120674A (en) * 1981-01-19 1982-07-27 Matsushita Electric Ind Co Ltd Detection of etching

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3994793A (en) * 1975-05-22 1976-11-30 International Business Machines Corporation Reactive ion etching of aluminum
JPS52123173A (en) * 1976-04-08 1977-10-17 Fuji Photo Film Co Ltd Sputter etching method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3994793A (en) * 1975-05-22 1976-11-30 International Business Machines Corporation Reactive ion etching of aluminum
JPS52123173A (en) * 1976-04-08 1977-10-17 Fuji Photo Film Co Ltd Sputter etching method

Also Published As

Publication number Publication date
JPS556407A (en) 1980-01-17

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