JPS5532096U - - Google Patents

Info

Publication number
JPS5532096U
JPS5532096U JP11630278U JP11630278U JPS5532096U JP S5532096 U JPS5532096 U JP S5532096U JP 11630278 U JP11630278 U JP 11630278U JP 11630278 U JP11630278 U JP 11630278U JP S5532096 U JPS5532096 U JP S5532096U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11630278U
Other languages
Japanese (ja)
Other versions
JPS5824436Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978116302U priority Critical patent/JPS5824436Y2/ja
Publication of JPS5532096U publication Critical patent/JPS5532096U/ja
Application granted granted Critical
Publication of JPS5824436Y2 publication Critical patent/JPS5824436Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP1978116302U 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト Expired JPS5824436Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978116302U JPS5824436Y2 (ja) 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978116302U JPS5824436Y2 (ja) 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト

Publications (2)

Publication Number Publication Date
JPS5532096U true JPS5532096U (cs) 1980-03-01
JPS5824436Y2 JPS5824436Y2 (ja) 1983-05-25

Family

ID=29068722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978116302U Expired JPS5824436Y2 (ja) 1978-08-24 1978-08-24 半導体基板熱処理用ボ−ト

Country Status (1)

Country Link
JP (1) JPS5824436Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130418A (ja) * 1983-01-17 1984-07-27 Nec Kyushu Ltd 加熱処理システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549666U (cs) * 1977-06-23 1979-01-22
JPS54184078U (cs) * 1978-06-19 1979-12-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549666U (cs) * 1977-06-23 1979-01-22
JPS54184078U (cs) * 1978-06-19 1979-12-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130418A (ja) * 1983-01-17 1984-07-27 Nec Kyushu Ltd 加熱処理システム

Also Published As

Publication number Publication date
JPS5824436Y2 (ja) 1983-05-25

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