JPS549666U - - Google Patents

Info

Publication number
JPS549666U
JPS549666U JP8300077U JP8300077U JPS549666U JP S549666 U JPS549666 U JP S549666U JP 8300077 U JP8300077 U JP 8300077U JP 8300077 U JP8300077 U JP 8300077U JP S549666 U JPS549666 U JP S549666U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8300077U
Other languages
Japanese (ja)
Other versions
JPS5918673Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977083000U priority Critical patent/JPS5918673Y2/ja
Publication of JPS549666U publication Critical patent/JPS549666U/ja
Application granted granted Critical
Publication of JPS5918673Y2 publication Critical patent/JPS5918673Y2/ja
Expired legal-status Critical Current

Links

JP1977083000U 1977-06-23 1977-06-23 半導体装置用熱処理炉 Expired JPS5918673Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977083000U JPS5918673Y2 (ja) 1977-06-23 1977-06-23 半導体装置用熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977083000U JPS5918673Y2 (ja) 1977-06-23 1977-06-23 半導体装置用熱処理炉

Publications (2)

Publication Number Publication Date
JPS549666U true JPS549666U (cs) 1979-01-22
JPS5918673Y2 JPS5918673Y2 (ja) 1984-05-30

Family

ID=29004377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977083000U Expired JPS5918673Y2 (ja) 1977-06-23 1977-06-23 半導体装置用熱処理炉

Country Status (1)

Country Link
JP (1) JPS5918673Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532096U (cs) * 1978-08-24 1980-03-01

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159252A (cs) * 1974-06-12 1975-12-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159252A (cs) * 1974-06-12 1975-12-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5532096U (cs) * 1978-08-24 1980-03-01

Also Published As

Publication number Publication date
JPS5918673Y2 (ja) 1984-05-30

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