JPS5529579B2 - - Google Patents
Info
- Publication number
- JPS5529579B2 JPS5529579B2 JP9498872A JP9498872A JPS5529579B2 JP S5529579 B2 JPS5529579 B2 JP S5529579B2 JP 9498872 A JP9498872 A JP 9498872A JP 9498872 A JP9498872 A JP 9498872A JP S5529579 B2 JPS5529579 B2 JP S5529579B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9498872A JPS5529579B2 (pt) | 1972-09-21 | 1972-09-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9498872A JPS5529579B2 (pt) | 1972-09-21 | 1972-09-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4952579A JPS4952579A (pt) | 1974-05-22 |
JPS5529579B2 true JPS5529579B2 (pt) | 1980-08-05 |
Family
ID=14125253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9498872A Expired JPS5529579B2 (pt) | 1972-09-21 | 1972-09-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5529579B2 (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007119735A1 (ja) | 2006-04-12 | 2007-10-25 | Kuraray Co., Ltd. | 分散安定剤 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60223130A (ja) * | 1984-04-19 | 1985-11-07 | Sharp Corp | 基板の洗滌乾燥方法及びその装置 |
JPH02110993A (ja) * | 1988-10-20 | 1990-04-24 | Fujitsu Ltd | プリント配線板の洗浄装置 |
KR100209751B1 (ko) * | 1996-04-12 | 1999-07-15 | 구본준 | 반도체 웨이퍼 세정 장치 |
-
1972
- 1972-09-21 JP JP9498872A patent/JPS5529579B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007119735A1 (ja) | 2006-04-12 | 2007-10-25 | Kuraray Co., Ltd. | 分散安定剤 |
Also Published As
Publication number | Publication date |
---|---|
JPS4952579A (pt) | 1974-05-22 |