JPS5529579B2 - - Google Patents

Info

Publication number
JPS5529579B2
JPS5529579B2 JP9498872A JP9498872A JPS5529579B2 JP S5529579 B2 JPS5529579 B2 JP S5529579B2 JP 9498872 A JP9498872 A JP 9498872A JP 9498872 A JP9498872 A JP 9498872A JP S5529579 B2 JPS5529579 B2 JP S5529579B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9498872A
Other languages
Japanese (ja)
Other versions
JPS4952579A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9498872A priority Critical patent/JPS5529579B2/ja
Publication of JPS4952579A publication Critical patent/JPS4952579A/ja
Publication of JPS5529579B2 publication Critical patent/JPS5529579B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP9498872A 1972-09-21 1972-09-21 Expired JPS5529579B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9498872A JPS5529579B2 (cs) 1972-09-21 1972-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9498872A JPS5529579B2 (cs) 1972-09-21 1972-09-21

Publications (2)

Publication Number Publication Date
JPS4952579A JPS4952579A (cs) 1974-05-22
JPS5529579B2 true JPS5529579B2 (cs) 1980-08-05

Family

ID=14125253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9498872A Expired JPS5529579B2 (cs) 1972-09-21 1972-09-21

Country Status (1)

Country Link
JP (1) JPS5529579B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007119735A1 (ja) 2006-04-12 2007-10-25 Kuraray Co., Ltd. 分散安定剤

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60223130A (ja) * 1984-04-19 1985-11-07 Sharp Corp 基板の洗滌乾燥方法及びその装置
JPH02110993A (ja) * 1988-10-20 1990-04-24 Fujitsu Ltd プリント配線板の洗浄装置
KR100209751B1 (ko) * 1996-04-12 1999-07-15 구본준 반도체 웨이퍼 세정 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007119735A1 (ja) 2006-04-12 2007-10-25 Kuraray Co., Ltd. 分散安定剤

Also Published As

Publication number Publication date
JPS4952579A (cs) 1974-05-22

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