JPS5525373B2 - - Google Patents

Info

Publication number
JPS5525373B2
JPS5525373B2 JP957173A JP957173A JPS5525373B2 JP S5525373 B2 JPS5525373 B2 JP S5525373B2 JP 957173 A JP957173 A JP 957173A JP 957173 A JP957173 A JP 957173A JP S5525373 B2 JPS5525373 B2 JP S5525373B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP957173A
Other languages
Japanese (ja)
Other versions
JPS4885282A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4885282A publication Critical patent/JPS4885282A/ja
Publication of JPS5525373B2 publication Critical patent/JPS5525373B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
JP957173A 1972-02-04 1973-01-24 Expired JPS5525373B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22346272A 1972-02-04 1972-02-04

Publications (2)

Publication Number Publication Date
JPS4885282A JPS4885282A (enrdf_load_stackoverflow) 1973-11-12
JPS5525373B2 true JPS5525373B2 (enrdf_load_stackoverflow) 1980-07-05

Family

ID=22836600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP957173A Expired JPS5525373B2 (enrdf_load_stackoverflow) 1972-02-04 1973-01-24

Country Status (5)

Country Link
JP (1) JPS5525373B2 (enrdf_load_stackoverflow)
CA (1) CA968464A (enrdf_load_stackoverflow)
DE (1) DE2303465C3 (enrdf_load_stackoverflow)
FR (1) FR2170747A5 (enrdf_load_stackoverflow)
GB (1) GB1421624A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5033387U (enrdf_load_stackoverflow) * 1973-07-20 1975-04-10
DE3135511C2 (de) * 1981-09-08 1986-03-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Drucksensor, bestehend aus einem zylindrischen Topfkreis mit als Membran ausgebildeter Stirnfläche
JPH086275Y2 (ja) * 1987-12-19 1996-02-21 株式会社トーキン 静電容量式荷重センサ
DE4111119A1 (de) * 1991-04-03 1992-10-08 Univ Chemnitz Tech Stapelbare mikromechanische kapazitive druckmesszelle
EP0992779B1 (de) * 1998-10-06 2003-05-21 Vibro-Meter Sa Beschleunigungskompensiertes Druckmessgerät

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808545A (en) * 1955-01-24 1957-10-01 Walter J Hirtreiter Pressure pick-up-differential-type acceleration-free
US3040583A (en) * 1959-12-10 1962-06-26 United Aircraft Corp Optical pressure transducer
GB949433A (en) * 1962-07-19 1964-02-12 Rosemount Engineering A G Improvements in or relating to pressure transducers
FR1396745A (fr) * 1964-05-22 1965-04-23 Ultra Electronics Ltd Transducteur électromécanique
US3356963A (en) * 1966-06-23 1967-12-05 Willard E Buck Fused quartz motion sensitive transducer
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US3529468A (en) * 1968-01-02 1970-09-22 Teledyne Inc Meter for measuring compressive stress in earthen masses and the like

Also Published As

Publication number Publication date
FR2170747A5 (enrdf_load_stackoverflow) 1973-09-14
GB1421624A (en) 1976-01-21
DE2303465C3 (de) 1981-09-17
JPS4885282A (enrdf_load_stackoverflow) 1973-11-12
CA968464A (en) 1975-05-27
DE2303465A1 (de) 1973-08-16
DE2303465B2 (de) 1980-12-11

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