JPS5524931B2 - - Google Patents

Info

Publication number
JPS5524931B2
JPS5524931B2 JP9175975A JP9175975A JPS5524931B2 JP S5524931 B2 JPS5524931 B2 JP S5524931B2 JP 9175975 A JP9175975 A JP 9175975A JP 9175975 A JP9175975 A JP 9175975A JP S5524931 B2 JPS5524931 B2 JP S5524931B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9175975A
Other languages
Japanese (ja)
Other versions
JPS5215479A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50091759A priority Critical patent/JPS5215479A/ja
Publication of JPS5215479A publication Critical patent/JPS5215479A/ja
Publication of JPS5524931B2 publication Critical patent/JPS5524931B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP50091759A 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases Granted JPS5215479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091759A JPS5215479A (en) 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091759A JPS5215479A (en) 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases

Publications (2)

Publication Number Publication Date
JPS5215479A JPS5215479A (en) 1977-02-05
JPS5524931B2 true JPS5524931B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-02

Family

ID=14035460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091759A Granted JPS5215479A (en) 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases

Country Status (1)

Country Link
JP (1) JPS5215479A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11226341A (ja) * 1998-02-18 1999-08-24 Ebara Corp 気体の浄化方法及び装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6544483B1 (en) * 1999-03-25 2003-04-08 Korea M.A.T. Co., Ltd. Adsorbent gas scrubber to dispose the gas generated during the semiconductor manufacturing process
JP6204728B2 (ja) * 2013-07-10 2017-09-27 日立オートモティブシステムズメジャメント株式会社 ベーパ回収装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11226341A (ja) * 1998-02-18 1999-08-24 Ebara Corp 気体の浄化方法及び装置

Also Published As

Publication number Publication date
JPS5215479A (en) 1977-02-05

Similar Documents

Publication Publication Date Title
JPS5211714U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH607829A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG21564A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG22166A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG22472A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG22866A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG23166A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH586582A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH589223A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH590127A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH591587A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH592192B5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH592364A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH592886A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH593654A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH593837A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH593858A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH594816A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH595279A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH596833A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH597070A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH597677A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH598226A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH598237A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH598631B5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)