JPS5215479A - Apparatus for adsorption and removal of harmful gases - Google Patents

Apparatus for adsorption and removal of harmful gases

Info

Publication number
JPS5215479A
JPS5215479A JP50091759A JP9175975A JPS5215479A JP S5215479 A JPS5215479 A JP S5215479A JP 50091759 A JP50091759 A JP 50091759A JP 9175975 A JP9175975 A JP 9175975A JP S5215479 A JPS5215479 A JP S5215479A
Authority
JP
Japan
Prior art keywords
adsorption
removal
harmful gases
harmful gas
prolong
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50091759A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5524931B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Tomoya Tokuhiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Original Assignee
Shimizu Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Construction Co Ltd filed Critical Shimizu Construction Co Ltd
Priority to JP50091759A priority Critical patent/JPS5215479A/ja
Publication of JPS5215479A publication Critical patent/JPS5215479A/ja
Publication of JPS5524931B2 publication Critical patent/JPS5524931B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP50091759A 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases Granted JPS5215479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091759A JPS5215479A (en) 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091759A JPS5215479A (en) 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases

Publications (2)

Publication Number Publication Date
JPS5215479A true JPS5215479A (en) 1977-02-05
JPS5524931B2 JPS5524931B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-02

Family

ID=14035460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091759A Granted JPS5215479A (en) 1975-07-28 1975-07-28 Apparatus for adsorption and removal of harmful gases

Country Status (1)

Country Link
JP (1) JPS5215479A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2348378A (en) * 1999-03-25 2000-10-04 Korea M A T Co Ltd Multi-cartridge adsorbent gas scrubber
JP2015016421A (ja) * 2013-07-10 2015-01-29 トキコテクノ株式会社 ベーパ回収装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11226341A (ja) * 1998-02-18 1999-08-24 Ebara Corp 気体の浄化方法及び装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2348378A (en) * 1999-03-25 2000-10-04 Korea M A T Co Ltd Multi-cartridge adsorbent gas scrubber
GB2348378B (en) * 1999-03-25 2001-05-23 Korea M A T Co Ltd Adsorbent gas scrubber to dispose the gas generated during the semiconductor manufacturing process
US6544483B1 (en) * 1999-03-25 2003-04-08 Korea M.A.T. Co., Ltd. Adsorbent gas scrubber to dispose the gas generated during the semiconductor manufacturing process
JP2015016421A (ja) * 2013-07-10 2015-01-29 トキコテクノ株式会社 ベーパ回収装置

Also Published As

Publication number Publication date
JPS5524931B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-02

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