JPS5524685A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS5524685A
JPS5524685A JP9857978A JP9857978A JPS5524685A JP S5524685 A JPS5524685 A JP S5524685A JP 9857978 A JP9857978 A JP 9857978A JP 9857978 A JP9857978 A JP 9857978A JP S5524685 A JPS5524685 A JP S5524685A
Authority
JP
Japan
Prior art keywords
thin plates
warped
sides
piezoelectric elements
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9857978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134612B2 (enrdf_load_stackoverflow
Inventor
Toshihiro Yamazoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9857978A priority Critical patent/JPS5524685A/ja
Publication of JPS5524685A publication Critical patent/JPS5524685A/ja
Publication of JPS6134612B2 publication Critical patent/JPS6134612B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP9857978A 1978-08-11 1978-08-11 Pressure sensor Granted JPS5524685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9857978A JPS5524685A (en) 1978-08-11 1978-08-11 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9857978A JPS5524685A (en) 1978-08-11 1978-08-11 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS5524685A true JPS5524685A (en) 1980-02-21
JPS6134612B2 JPS6134612B2 (enrdf_load_stackoverflow) 1986-08-08

Family

ID=14223562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9857978A Granted JPS5524685A (en) 1978-08-11 1978-08-11 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS5524685A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127147U (ja) * 1983-02-16 1984-08-27 三井造船株式会社 圧力変換器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127147U (ja) * 1983-02-16 1984-08-27 三井造船株式会社 圧力変換器

Also Published As

Publication number Publication date
JPS6134612B2 (enrdf_load_stackoverflow) 1986-08-08

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