JPS5523909B2 - - Google Patents
Info
- Publication number
- JPS5523909B2 JPS5523909B2 JP3925576A JP3925576A JPS5523909B2 JP S5523909 B2 JPS5523909 B2 JP S5523909B2 JP 3925576 A JP3925576 A JP 3925576A JP 3925576 A JP3925576 A JP 3925576A JP S5523909 B2 JPS5523909 B2 JP S5523909B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3925576A JPS52123362A (en) | 1976-04-09 | 1976-04-09 | Device for making thin metal film |
US05/725,487 US4080281A (en) | 1976-04-09 | 1976-09-22 | Apparatus for making metal films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3925576A JPS52123362A (en) | 1976-04-09 | 1976-04-09 | Device for making thin metal film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52123362A JPS52123362A (en) | 1977-10-17 |
JPS5523909B2 true JPS5523909B2 (cs) | 1980-06-25 |
Family
ID=12548021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3925576A Granted JPS52123362A (en) | 1976-04-09 | 1976-04-09 | Device for making thin metal film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52123362A (cs) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS645892U (cs) * | 1987-06-30 | 1989-01-13 | ||
JPH0190688U (cs) * | 1987-12-07 | 1989-06-14 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641375A (en) * | 1979-09-13 | 1981-04-18 | Matsushita Electric Ind Co Ltd | Sputtering apparatus |
JP3192642B2 (ja) | 1998-10-02 | 2001-07-30 | 住友特殊金属株式会社 | 表面処理用支持部材、表面処理用ホルダー、並びに表面処理方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS515279A (en) * | 1974-05-28 | 1976-01-16 | Corning Glass Works | Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi |
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1976
- 1976-04-09 JP JP3925576A patent/JPS52123362A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS515279A (en) * | 1974-05-28 | 1976-01-16 | Corning Glass Works | Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS645892U (cs) * | 1987-06-30 | 1989-01-13 | ||
JPH0190688U (cs) * | 1987-12-07 | 1989-06-14 |
Also Published As
Publication number | Publication date |
---|---|
JPS52123362A (en) | 1977-10-17 |