JPS5521459B2 - - Google Patents
Info
- Publication number
- JPS5521459B2 JPS5521459B2 JP9875175A JP9875175A JPS5521459B2 JP S5521459 B2 JPS5521459 B2 JP S5521459B2 JP 9875175 A JP9875175 A JP 9875175A JP 9875175 A JP9875175 A JP 9875175A JP S5521459 B2 JPS5521459 B2 JP S5521459B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9875175A JPS5222479A (en) | 1975-08-13 | 1975-08-13 | Method of inspecting masks |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9875175A JPS5222479A (en) | 1975-08-13 | 1975-08-13 | Method of inspecting masks |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5222479A JPS5222479A (en) | 1977-02-19 |
| JPS5521459B2 true JPS5521459B2 (en:Method) | 1980-06-10 |
Family
ID=14228152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9875175A Granted JPS5222479A (en) | 1975-08-13 | 1975-08-13 | Method of inspecting masks |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222479A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55108738A (en) * | 1979-02-13 | 1980-08-21 | Fujitsu Ltd | Inspection for registration of photomask |
| JPS5680132A (en) * | 1979-12-06 | 1981-07-01 | Nec Corp | Inspection of mask |
| JP3060261B2 (ja) * | 1991-03-19 | 2000-07-10 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
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1975
- 1975-08-13 JP JP9875175A patent/JPS5222479A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5222479A (en) | 1977-02-19 |