JPS5521459B2 - - Google Patents

Info

Publication number
JPS5521459B2
JPS5521459B2 JP9875175A JP9875175A JPS5521459B2 JP S5521459 B2 JPS5521459 B2 JP S5521459B2 JP 9875175 A JP9875175 A JP 9875175A JP 9875175 A JP9875175 A JP 9875175A JP S5521459 B2 JPS5521459 B2 JP S5521459B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9875175A
Other languages
Japanese (ja)
Other versions
JPS5222479A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9875175A priority Critical patent/JPS5222479A/ja
Publication of JPS5222479A publication Critical patent/JPS5222479A/ja
Publication of JPS5521459B2 publication Critical patent/JPS5521459B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9875175A 1975-08-13 1975-08-13 Method of inspecting masks Granted JPS5222479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9875175A JPS5222479A (en) 1975-08-13 1975-08-13 Method of inspecting masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9875175A JPS5222479A (en) 1975-08-13 1975-08-13 Method of inspecting masks

Publications (2)

Publication Number Publication Date
JPS5222479A JPS5222479A (en) 1977-02-19
JPS5521459B2 true JPS5521459B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-06-10

Family

ID=14228152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9875175A Granted JPS5222479A (en) 1975-08-13 1975-08-13 Method of inspecting masks

Country Status (1)

Country Link
JP (1) JPS5222479A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55108738A (en) * 1979-02-13 1980-08-21 Fujitsu Ltd Inspection for registration of photomask
JPS5680132A (en) * 1979-12-06 1981-07-01 Nec Corp Inspection of mask
JP3060261B2 (ja) * 1991-03-19 2000-07-10 株式会社半導体エネルギー研究所 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5222479A (en) 1977-02-19

Similar Documents

Publication Publication Date Title
FR2326228B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5439173B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5521459B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5310749Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5544636B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5319674B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5238518U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5287210U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5199676U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5272365U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5263606U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH607385A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH605328A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH598771A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH596819A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH610874A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH610002A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH596706A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH609901A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH609787A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH595806A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH608894A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH607949A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH607422A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH147275A4 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)