JPS5521054Y2 - - Google Patents

Info

Publication number
JPS5521054Y2
JPS5521054Y2 JP4905875U JP4905875U JPS5521054Y2 JP S5521054 Y2 JPS5521054 Y2 JP S5521054Y2 JP 4905875 U JP4905875 U JP 4905875U JP 4905875 U JP4905875 U JP 4905875U JP S5521054 Y2 JPS5521054 Y2 JP S5521054Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4905875U
Other languages
Japanese (ja)
Other versions
JPS51152354U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4905875U priority Critical patent/JPS5521054Y2/ja
Publication of JPS51152354U publication Critical patent/JPS51152354U/ja
Application granted granted Critical
Publication of JPS5521054Y2 publication Critical patent/JPS5521054Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
JP4905875U 1975-04-11 1975-04-11 Expired JPS5521054Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4905875U JPS5521054Y2 (en:Method) 1975-04-11 1975-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4905875U JPS5521054Y2 (en:Method) 1975-04-11 1975-04-11

Publications (2)

Publication Number Publication Date
JPS51152354U JPS51152354U (en:Method) 1976-12-04
JPS5521054Y2 true JPS5521054Y2 (en:Method) 1980-05-21

Family

ID=28508250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4905875U Expired JPS5521054Y2 (en:Method) 1975-04-11 1975-04-11

Country Status (1)

Country Link
JP (1) JPS5521054Y2 (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104126053A (zh) * 2012-01-30 2014-10-29 爱德华兹有限公司 具有横向壁的多级泵
JP2016164383A (ja) * 2015-03-06 2016-09-08 有限会社ハットリモデル 消音器及び消音構造

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016160772A (ja) * 2015-02-27 2016-09-05 有限会社ハットリモデル ルーツ型ポンプ
JP6630174B2 (ja) * 2015-03-09 2020-01-15 株式会社荏原製作所 真空ポンプ
US20160265532A1 (en) * 2015-03-09 2016-09-15 Ebara Corporation Vacuum pump
ES2899908T3 (es) * 2015-10-02 2022-03-15 Leybold Gmbh Bomba rotativa de paletas multietapa
GB2631495A (en) * 2023-07-03 2025-01-08 Edwards Ltd Interstage plate for a vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104126053A (zh) * 2012-01-30 2014-10-29 爱德华兹有限公司 具有横向壁的多级泵
JP2015509165A (ja) * 2012-01-30 2015-03-26 エドワーズ リミテッド ポンプ
JP2016164383A (ja) * 2015-03-06 2016-09-08 有限会社ハットリモデル 消音器及び消音構造

Also Published As

Publication number Publication date
JPS51152354U (en:Method) 1976-12-04

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