JPS5521054Y2 - - Google Patents

Info

Publication number
JPS5521054Y2
JPS5521054Y2 JP4905875U JP4905875U JPS5521054Y2 JP S5521054 Y2 JPS5521054 Y2 JP S5521054Y2 JP 4905875 U JP4905875 U JP 4905875U JP 4905875 U JP4905875 U JP 4905875U JP S5521054 Y2 JPS5521054 Y2 JP S5521054Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4905875U
Other versions
JPS51152354U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4905875U priority Critical patent/JPS5521054Y2/ja
Publication of JPS51152354U publication Critical patent/JPS51152354U/ja
Application granted granted Critical
Publication of JPS5521054Y2 publication Critical patent/JPS5521054Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)
JP4905875U 1975-04-11 1975-04-11 Expired JPS5521054Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4905875U JPS5521054Y2 (ja) 1975-04-11 1975-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4905875U JPS5521054Y2 (ja) 1975-04-11 1975-04-11

Publications (2)

Publication Number Publication Date
JPS51152354U JPS51152354U (ja) 1976-12-04
JPS5521054Y2 true JPS5521054Y2 (ja) 1980-05-21

Family

ID=28508250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4905875U Expired JPS5521054Y2 (ja) 1975-04-11 1975-04-11

Country Status (1)

Country Link
JP (1) JPS5521054Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104126053A (zh) * 2012-01-30 2014-10-29 爱德华兹有限公司 具有横向壁的多级泵
JP2016164383A (ja) * 2015-03-06 2016-09-08 有限会社ハットリモデル 消音器及び消音構造

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016160772A (ja) * 2015-02-27 2016-09-05 有限会社ハットリモデル ルーツ型ポンプ
US20160265532A1 (en) * 2015-03-09 2016-09-15 Ebara Corporation Vacuum pump
JP6630174B2 (ja) * 2015-03-09 2020-01-15 株式会社荏原製作所 真空ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104126053A (zh) * 2012-01-30 2014-10-29 爱德华兹有限公司 具有横向壁的多级泵
JP2015509165A (ja) * 2012-01-30 2015-03-26 エドワーズ リミテッド ポンプ
JP2016164383A (ja) * 2015-03-06 2016-09-08 有限会社ハットリモデル 消音器及び消音構造

Also Published As

Publication number Publication date
JPS51152354U (ja) 1976-12-04

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