JPS5519433B2 - - Google Patents

Info

Publication number
JPS5519433B2
JPS5519433B2 JP6564973A JP6564973A JPS5519433B2 JP S5519433 B2 JPS5519433 B2 JP S5519433B2 JP 6564973 A JP6564973 A JP 6564973A JP 6564973 A JP6564973 A JP 6564973A JP S5519433 B2 JPS5519433 B2 JP S5519433B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6564973A
Other languages
Japanese (ja)
Other versions
JPS5016486A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6564973A priority Critical patent/JPS5519433B2/ja
Publication of JPS5016486A publication Critical patent/JPS5016486A/ja
Publication of JPS5519433B2 publication Critical patent/JPS5519433B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP6564973A 1973-06-11 1973-06-11 Expired JPS5519433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6564973A JPS5519433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-06-11 1973-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6564973A JPS5519433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-06-11 1973-06-11

Publications (2)

Publication Number Publication Date
JPS5016486A JPS5016486A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-21
JPS5519433B2 true JPS5519433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-05-26

Family

ID=13293055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6564973A Expired JPS5519433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-06-11 1973-06-11

Country Status (1)

Country Link
JP (1) JPS5519433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451489A (en) * 1977-09-30 1979-04-23 Toshiba Corp Semiconductor pressure converter
JPS6427275A (en) * 1988-07-08 1989-01-30 Toshiba Corp Semiconductor pressure measuring apparatus
JP4697004B2 (ja) * 2006-03-29 2011-06-08 株式会社日立製作所 力学量測定装置

Also Published As

Publication number Publication date
JPS5016486A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-21

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