JPS5518876B2 - - Google Patents

Info

Publication number
JPS5518876B2
JPS5518876B2 JP9451576A JP9451576A JPS5518876B2 JP S5518876 B2 JPS5518876 B2 JP S5518876B2 JP 9451576 A JP9451576 A JP 9451576A JP 9451576 A JP9451576 A JP 9451576A JP S5518876 B2 JPS5518876 B2 JP S5518876B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9451576A
Other languages
Japanese (ja)
Other versions
JPS5320376A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9451576A priority Critical patent/JPS5320376A/ja
Publication of JPS5320376A publication Critical patent/JPS5320376A/ja
Publication of JPS5518876B2 publication Critical patent/JPS5518876B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP9451576A 1976-08-10 1976-08-10 Large dose radiation measuring system of wide dose region Granted JPS5320376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9451576A JPS5320376A (en) 1976-08-10 1976-08-10 Large dose radiation measuring system of wide dose region

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9451576A JPS5320376A (en) 1976-08-10 1976-08-10 Large dose radiation measuring system of wide dose region

Publications (2)

Publication Number Publication Date
JPS5320376A JPS5320376A (en) 1978-02-24
JPS5518876B2 true JPS5518876B2 (OSRAM) 1980-05-22

Family

ID=14112450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9451576A Granted JPS5320376A (en) 1976-08-10 1976-08-10 Large dose radiation measuring system of wide dose region

Country Status (1)

Country Link
JP (1) JPS5320376A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02275631A (ja) * 1989-01-11 1990-11-09 Dainippon Screen Mfg Co Ltd 基板の洗浄処理方法及びその装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3086117A (en) * 1959-07-20 1963-04-16 Raytheon Co Semiconductive dosimeters

Also Published As

Publication number Publication date
JPS5320376A (en) 1978-02-24

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