JPS5517505B1 - - Google Patents
Info
- Publication number
- JPS5517505B1 JPS5517505B1 JP10577470A JP10577470A JPS5517505B1 JP S5517505 B1 JPS5517505 B1 JP S5517505B1 JP 10577470 A JP10577470 A JP 10577470A JP 10577470 A JP10577470 A JP 10577470A JP S5517505 B1 JPS5517505 B1 JP S5517505B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691960463 DE1960463A1 (de) | 1969-12-02 | 1969-12-02 | Verfahren zum fehlerfreien fotografischen UEbertragen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5517505B1 true JPS5517505B1 (Direct) | 1980-05-12 |
Family
ID=5752748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10577470A Pending JPS5517505B1 (Direct) | 1969-12-02 | 1970-11-30 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5517505B1 (Direct) |
| DE (1) | DE1960463A1 (Direct) |
| FR (1) | FR2073447B1 (Direct) |
| GB (1) | GB1334377A (Direct) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005236291A (ja) * | 2004-02-18 | 2005-09-02 | Asml Netherlands Bv | リソグラフィック装置及びデバイス製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4099062A (en) * | 1976-12-27 | 1978-07-04 | International Business Machines Corporation | Electron beam lithography process |
| US4394437A (en) | 1981-09-24 | 1983-07-19 | International Business Machines Corporation | Process for increasing resolution of photolithographic images |
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1969
- 1969-12-02 DE DE19691960463 patent/DE1960463A1/de active Pending
-
1970
- 1970-11-26 GB GB1334377D patent/GB1334377A/en not_active Expired
- 1970-11-30 JP JP10577470A patent/JPS5517505B1/ja active Pending
- 1970-12-02 FR FR7043379A patent/FR2073447B1/fr not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005236291A (ja) * | 2004-02-18 | 2005-09-02 | Asml Netherlands Bv | リソグラフィック装置及びデバイス製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2073447B1 (Direct) | 1973-02-02 |
| GB1334377A (en) | 1973-10-17 |
| DE1960463A1 (de) | 1971-06-09 |
| FR2073447A1 (Direct) | 1971-10-01 |