JPS5517103B2 - - Google Patents
Info
- Publication number
- JPS5517103B2 JPS5517103B2 JP12972274A JP12972274A JPS5517103B2 JP S5517103 B2 JPS5517103 B2 JP S5517103B2 JP 12972274 A JP12972274 A JP 12972274A JP 12972274 A JP12972274 A JP 12972274A JP S5517103 B2 JPS5517103 B2 JP S5517103B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972274A JPS5155787A (en) | 1974-11-11 | 1974-11-11 | Shinkujochakuhoho oyobi sochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12972274A JPS5155787A (en) | 1974-11-11 | 1974-11-11 | Shinkujochakuhoho oyobi sochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5155787A JPS5155787A (en) | 1976-05-17 |
| JPS5517103B2 true JPS5517103B2 (enExample) | 1980-05-09 |
Family
ID=15016569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12972274A Granted JPS5155787A (en) | 1974-11-11 | 1974-11-11 | Shinkujochakuhoho oyobi sochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5155787A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51135882A (en) * | 1975-05-20 | 1976-11-25 | Osaka Kouon Denki Kk | Process for supplying continu ously evaporating substance |
| JPS5623329Y2 (enExample) * | 1977-07-08 | 1981-06-01 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS516410B2 (enExample) * | 1971-09-30 | 1976-02-27 |
-
1974
- 1974-11-11 JP JP12972274A patent/JPS5155787A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5155787A (en) | 1976-05-17 |