JPS5155787A - Shinkujochakuhoho oyobi sochi - Google Patents

Shinkujochakuhoho oyobi sochi

Info

Publication number
JPS5155787A
JPS5155787A JP12972274A JP12972274A JPS5155787A JP S5155787 A JPS5155787 A JP S5155787A JP 12972274 A JP12972274 A JP 12972274A JP 12972274 A JP12972274 A JP 12972274A JP S5155787 A JPS5155787 A JP S5155787A
Authority
JP
Japan
Prior art keywords
shinkujochakuhoho
oyobi sochi
sochi
oyobi
shinkujochakuhoho oyobi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12972274A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5517103B2 (enExample
Inventor
Shigekazu Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koparu KK
Nidec Precision Corp
Original Assignee
Nidec Copal Corp
Koparu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Copal Corp, Koparu KK filed Critical Nidec Copal Corp
Priority to JP12972274A priority Critical patent/JPS5155787A/ja
Publication of JPS5155787A publication Critical patent/JPS5155787A/ja
Publication of JPS5517103B2 publication Critical patent/JPS5517103B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12972274A 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi Granted JPS5155787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12972274A JPS5155787A (en) 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12972274A JPS5155787A (en) 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi

Publications (2)

Publication Number Publication Date
JPS5155787A true JPS5155787A (en) 1976-05-17
JPS5517103B2 JPS5517103B2 (enExample) 1980-05-09

Family

ID=15016569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12972274A Granted JPS5155787A (en) 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi

Country Status (1)

Country Link
JP (1) JPS5155787A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135882A (en) * 1975-05-20 1976-11-25 Osaka Kouon Denki Kk Process for supplying continu ously evaporating substance
JPS5417824U (enExample) * 1977-07-08 1979-02-05

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841416A (enExample) * 1971-09-30 1973-06-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841416A (enExample) * 1971-09-30 1973-06-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135882A (en) * 1975-05-20 1976-11-25 Osaka Kouon Denki Kk Process for supplying continu ously evaporating substance
JPS5417824U (enExample) * 1977-07-08 1979-02-05

Also Published As

Publication number Publication date
JPS5517103B2 (enExample) 1980-05-09

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