JPS55161584A - Electron beam working machine - Google Patents
Electron beam working machineInfo
- Publication number
- JPS55161584A JPS55161584A JP7003879A JP7003879A JPS55161584A JP S55161584 A JPS55161584 A JP S55161584A JP 7003879 A JP7003879 A JP 7003879A JP 7003879 A JP7003879 A JP 7003879A JP S55161584 A JPS55161584 A JP S55161584A
- Authority
- JP
- Japan
- Prior art keywords
- focusing coil
- electron gun
- vacuum chamber
- work
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the electric discharge accident within an electron gun by disposing two beam adjusters and maintaining the distance between the work placed in a vacuum chamber and the 1st focusing coil at above the mean free path of molecules under working vacuum.
CONSTITUTION: The 2nd beam adjuster 20 consisting of the 2nd focusing coil 18 and 2nd deflecting coil 19 is fixed to the wall surface 2 of a vacuum chamber 1, and the 1st beam adjuster 8 consisting of the 1st focusing coil 6 and the 1st deflecting coil 7 is fixed by way of a supporting column 23 to its extension line. If at this time the distance L2 between the 1st focusing coil and the work 10 placed in the vacuum chamber is held at above the mean free path of the molecules corresponding to the degree of vacuum in the support column, the likelihood of the entry of the molecules of the gas, metal vapor, etc. evolved from the work radiated by electron beams 11 into an electron gun 9 is eliminated. Hence, the electric discharge accident in the electron gun is prevented and the stable beam working is accomplished.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7003879A JPS55161584A (en) | 1979-06-06 | 1979-06-06 | Electron beam working machine |
US06/131,857 US4327273A (en) | 1979-03-23 | 1980-03-19 | Method of treating a workpiece with electron beams and apparatus therefor |
EP80300891A EP0017405B1 (en) | 1979-03-23 | 1980-03-21 | Method of treating a workpiece with an electron beam |
DE8080300891T DE3070093D1 (en) | 1979-03-23 | 1980-03-21 | Method of treating a workpiece with an electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7003879A JPS55161584A (en) | 1979-06-06 | 1979-06-06 | Electron beam working machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55161584A true JPS55161584A (en) | 1980-12-16 |
Family
ID=13420008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7003879A Pending JPS55161584A (en) | 1979-03-23 | 1979-06-06 | Electron beam working machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55161584A (en) |
-
1979
- 1979-06-06 JP JP7003879A patent/JPS55161584A/en active Pending
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