JPS5514504B2 - - Google Patents

Info

Publication number
JPS5514504B2
JPS5514504B2 JP4930274A JP4930274A JPS5514504B2 JP S5514504 B2 JPS5514504 B2 JP S5514504B2 JP 4930274 A JP4930274 A JP 4930274A JP 4930274 A JP4930274 A JP 4930274A JP S5514504 B2 JPS5514504 B2 JP S5514504B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4930274A
Other languages
Japanese (ja)
Other versions
JPS5028393A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5028393A publication Critical patent/JPS5028393A/ja
Publication of JPS5514504B2 publication Critical patent/JPS5514504B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP4930274A 1973-05-08 1974-05-04 Expired JPS5514504B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7306378A NL7306378A (enrdf_load_stackoverflow) 1973-05-08 1973-05-08

Publications (2)

Publication Number Publication Date
JPS5028393A JPS5028393A (enrdf_load_stackoverflow) 1975-03-22
JPS5514504B2 true JPS5514504B2 (enrdf_load_stackoverflow) 1980-04-16

Family

ID=19818814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4930274A Expired JPS5514504B2 (enrdf_load_stackoverflow) 1973-05-08 1974-05-04

Country Status (6)

Country Link
US (1) US3920990A (enrdf_load_stackoverflow)
JP (1) JPS5514504B2 (enrdf_load_stackoverflow)
DE (1) DE2420275C3 (enrdf_load_stackoverflow)
FR (1) FR2229064B1 (enrdf_load_stackoverflow)
GB (1) GB1470847A (enrdf_load_stackoverflow)
NL (1) NL7306378A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
JPS57194446A (en) * 1981-05-22 1982-11-30 Shimadzu Corp Charged particle energy analyzer
US4588890A (en) * 1984-12-31 1986-05-13 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam
US4633084A (en) * 1985-01-16 1986-12-30 The United States Of America As Represented By The United States Department Of Energy High efficiency direct detection of ions from resonance ionization of sputtered atoms
DE3803424C2 (de) * 1988-02-05 1995-05-18 Gsf Forschungszentrum Umwelt Verfahren zur quantitativen, tiefendifferentiellen Analyse fester Proben
US5095208A (en) * 1988-06-24 1992-03-10 Hitachi, Ltd. Charged particle generating device and focusing lens therefor
US4941980A (en) * 1989-02-17 1990-07-17 Opal, Inc. System for measuring a topographical feature on a specimen
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
CA2206860A1 (en) * 1994-12-08 1996-06-13 Michael Mathias Merzenich Method and device for enhancing the recognition of speech among speech-impaired individuals
DE102004014582B4 (de) * 2004-03-25 2009-08-20 Bruker Daltonik Gmbh Ionenoptische Phasenvolumenkomprimierung
GB201011716D0 (en) * 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers
WO2022165397A1 (en) * 2021-02-01 2022-08-04 Fohtung Edwin Programmable and tunable cylindrical deflector analyzers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3735128A (en) * 1971-08-27 1973-05-22 Physical Electronics Ind Inc Field termination plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0299828A (ja) * 1988-10-06 1990-04-11 Iseki & Co Ltd 流量測定器

Also Published As

Publication number Publication date
FR2229064A1 (enrdf_load_stackoverflow) 1974-12-06
NL7306378A (enrdf_load_stackoverflow) 1974-11-12
DE2420275B2 (de) 1980-09-25
FR2229064B1 (enrdf_load_stackoverflow) 1977-06-24
US3920990A (en) 1975-11-18
DE2420275C3 (de) 1981-07-09
DE2420275A1 (de) 1974-11-28
GB1470847A (en) 1977-04-21
JPS5028393A (enrdf_load_stackoverflow) 1975-03-22

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