JPS55138852A - Wire bonding apparatus - Google Patents
Wire bonding apparatusInfo
- Publication number
- JPS55138852A JPS55138852A JP4687779A JP4687779A JPS55138852A JP S55138852 A JPS55138852 A JP S55138852A JP 4687779 A JP4687779 A JP 4687779A JP 4687779 A JP4687779 A JP 4687779A JP S55138852 A JPS55138852 A JP S55138852A
- Authority
- JP
- Japan
- Prior art keywords
- tool
- sliding plate
- downwardly
- wire bonding
- bonding apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
PURPOSE:To prevent the variations in the contacting position and surface of a tool in a wire bonding apparatus by vertically moving two slide plates and the tool. CONSTITUTION:When a tool 22 is moved to a bonding point, the first sliding plate 4 moves downwardly on the first supporting guide passage 1a, and the second sliding plate 10 moves downwardly by its own weight and being pushed by a reciprocating bar 23 of a linear actuator 23. When the tool 22 is grounded on a specimen, the first sliding plate 4 is further moved downwardly, but the second sliding plate 10 stops moving downwardly with the tool 22 as a stopper and imparts a bonding load thereto.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54046877A JPS5824015B2 (en) | 1979-04-17 | 1979-04-17 | wire bonding equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54046877A JPS5824015B2 (en) | 1979-04-17 | 1979-04-17 | wire bonding equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55138852A true JPS55138852A (en) | 1980-10-30 |
JPS5824015B2 JPS5824015B2 (en) | 1983-05-18 |
Family
ID=12759574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54046877A Expired JPS5824015B2 (en) | 1979-04-17 | 1979-04-17 | wire bonding equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5824015B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4598853A (en) * | 1984-05-21 | 1986-07-08 | Hughes Aircraft Company | Open-center flexural pivot wire bonding head |
JPH0292929U (en) * | 1989-01-10 | 1990-07-24 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59142775U (en) * | 1983-03-15 | 1984-09-25 | 株式会社測機舎 | Battery device for light wave distance meter |
JP2514852Y2 (en) * | 1988-04-08 | 1996-10-23 | 旭精密 株式会社 | Electronic surveying machine with handle |
JPH0260814U (en) * | 1989-10-19 | 1990-05-07 |
-
1979
- 1979-04-17 JP JP54046877A patent/JPS5824015B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4598853A (en) * | 1984-05-21 | 1986-07-08 | Hughes Aircraft Company | Open-center flexural pivot wire bonding head |
JPH0292929U (en) * | 1989-01-10 | 1990-07-24 |
Also Published As
Publication number | Publication date |
---|---|
JPS5824015B2 (en) | 1983-05-18 |
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