JPS55138830A - Wafer jig - Google Patents

Wafer jig

Info

Publication number
JPS55138830A
JPS55138830A JP4682479A JP4682479A JPS55138830A JP S55138830 A JPS55138830 A JP S55138830A JP 4682479 A JP4682479 A JP 4682479A JP 4682479 A JP4682479 A JP 4682479A JP S55138830 A JPS55138830 A JP S55138830A
Authority
JP
Japan
Prior art keywords
wafers
tool
wafer
wafer jig
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4682479A
Other languages
Japanese (ja)
Inventor
Susumu Nishiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4682479A priority Critical patent/JPS55138830A/en
Publication of JPS55138830A publication Critical patent/JPS55138830A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To eliminate contact between wafers by forming a wafer jig in such a manner that wafers inserted into the tool are forcibly inclined in the same direction. CONSTITUTION:A projection 10 is formed at one end of the impurity gas flow on the upstream in the body of the wafer tool. The wafers retained in the groove 4 of the tool body stays in the impurity gas flow inclined uniformly. The gas flows smoothly as there is no contact between wafers 6.
JP4682479A 1979-04-17 1979-04-17 Wafer jig Pending JPS55138830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4682479A JPS55138830A (en) 1979-04-17 1979-04-17 Wafer jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4682479A JPS55138830A (en) 1979-04-17 1979-04-17 Wafer jig

Publications (1)

Publication Number Publication Date
JPS55138830A true JPS55138830A (en) 1980-10-30

Family

ID=12758070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4682479A Pending JPS55138830A (en) 1979-04-17 1979-04-17 Wafer jig

Country Status (1)

Country Link
JP (1) JPS55138830A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6386213B1 (en) * 1999-08-20 2002-05-14 Mosel Vitelic Inc. Plate-tilting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6386213B1 (en) * 1999-08-20 2002-05-14 Mosel Vitelic Inc. Plate-tilting apparatus

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