JPS5513831A - Pattern checking method - Google Patents

Pattern checking method

Info

Publication number
JPS5513831A
JPS5513831A JP8575278A JP8575278A JPS5513831A JP S5513831 A JPS5513831 A JP S5513831A JP 8575278 A JP8575278 A JP 8575278A JP 8575278 A JP8575278 A JP 8575278A JP S5513831 A JPS5513831 A JP S5513831A
Authority
JP
Japan
Prior art keywords
sampling
sampling interval
sampled
defect
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8575278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6147365B2 (enrdf_load_stackoverflow
Inventor
Yoshiaki Goto
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8575278A priority Critical patent/JPS5513831A/ja
Publication of JPS5513831A publication Critical patent/JPS5513831A/ja
Publication of JPS6147365B2 publication Critical patent/JPS6147365B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Image Analysis (AREA)
JP8575278A 1978-07-14 1978-07-14 Pattern checking method Granted JPS5513831A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8575278A JPS5513831A (en) 1978-07-14 1978-07-14 Pattern checking method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8575278A JPS5513831A (en) 1978-07-14 1978-07-14 Pattern checking method

Publications (2)

Publication Number Publication Date
JPS5513831A true JPS5513831A (en) 1980-01-31
JPS6147365B2 JPS6147365B2 (enrdf_load_stackoverflow) 1986-10-18

Family

ID=13867579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8575278A Granted JPS5513831A (en) 1978-07-14 1978-07-14 Pattern checking method

Country Status (1)

Country Link
JP (1) JPS5513831A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5975140A (ja) * 1982-10-22 1984-04-27 Toshiba Corp 欠陥検査装置及び方法
JPS6213260A (ja) * 1985-07-10 1987-01-22 Mitsubishi Electric Corp 半田箔付装置
JP2008217494A (ja) * 2007-03-05 2008-09-18 Sharp Corp 画像処理方法、画像処理プログラムおよび画像処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5975140A (ja) * 1982-10-22 1984-04-27 Toshiba Corp 欠陥検査装置及び方法
JPS6213260A (ja) * 1985-07-10 1987-01-22 Mitsubishi Electric Corp 半田箔付装置
JP2008217494A (ja) * 2007-03-05 2008-09-18 Sharp Corp 画像処理方法、画像処理プログラムおよび画像処理装置

Also Published As

Publication number Publication date
JPS6147365B2 (enrdf_load_stackoverflow) 1986-10-18

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