JPS55137914A - Cleaning method for semiconductor producing device - Google Patents
Cleaning method for semiconductor producing deviceInfo
- Publication number
- JPS55137914A JPS55137914A JP4593279A JP4593279A JPS55137914A JP S55137914 A JPS55137914 A JP S55137914A JP 4593279 A JP4593279 A JP 4593279A JP 4593279 A JP4593279 A JP 4593279A JP S55137914 A JPS55137914 A JP S55137914A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- resins
- stripped
- contaminants
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/70—Maintenance
- B29C33/72—Cleaning
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
PURPOSE:To easily remove a foreign material and contaminants on a mold surface, a cavity and the like, by a method wherein adherent thermoplastic resin stuck on a heat-resisting sheet at heated and pressurized in a mold, and the sheet so processed is stripped. CONSTITUTION:Resin 14, such as preformed melamine resins or epoxy resins, are stuck on a heat-resisting paper, cloth, sheet, or net made of fine metal wires and the like 15. So processed sheet clamped by molds is heated and pressure-cured. When the mold is opened and the heated, pressure-cured sheet is stripped off a mold surface after curing is complete, all foreign materials and contaminants, such as resins and the like choked at air bents 13, cavities 7, and runners 4, are adhered to the melamine resins to be stripped, since the said resins have a strong adhesion. Contaminants of the mold surface and ones on the cavities 7 and runners 4 can thus be cleaned simultaneously.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4593279A JPS55137914A (en) | 1979-04-13 | 1979-04-13 | Cleaning method for semiconductor producing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4593279A JPS55137914A (en) | 1979-04-13 | 1979-04-13 | Cleaning method for semiconductor producing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55137914A true JPS55137914A (en) | 1980-10-28 |
Family
ID=12733030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4593279A Pending JPS55137914A (en) | 1979-04-13 | 1979-04-13 | Cleaning method for semiconductor producing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55137914A (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6236834A (en) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | Resin sealing apparatus and method |
WO1987003531A1 (en) * | 1985-12-13 | 1987-06-18 | Pas Ireneus Johannes Theodorus | Method and composite article for cleaning molds |
EP0271107A2 (en) * | 1986-12-11 | 1988-06-15 | Nitto Denko Corporation | Mold cleaning composition, sheet for cleaning mold, and method for cleaning mold using said cleaning sheet |
JPS63148645A (en) * | 1986-12-11 | 1988-06-21 | Kyushu Nitto Denko Kk | Manufacture of semiconductor device |
JPH0195010A (en) * | 1987-10-07 | 1989-04-13 | Matsushita Electron Corp | Cleaning method for molding die |
JPH07273135A (en) * | 1995-01-05 | 1995-10-20 | Nitto Denko Corp | Manufacture of semiconductor device |
EP0704292A1 (en) * | 1994-03-30 | 1996-04-03 | Sankyokasei Kabushiki Kaisha | Resin molding method and resin molding machine |
JPH11207752A (en) * | 1998-01-26 | 1999-08-03 | Hitachi Ltd | Sheet for preventing oxidation of molding die and method for preventing oxidation of molding die using sheet |
CN1058929C (en) * | 1997-03-20 | 2000-11-29 | 超丰电子股份有限公司 | Mold washing method improvement for thermosetting plastic injection forming mold |
KR20030016022A (en) * | 2001-08-20 | 2003-02-26 | 다이몬지 카부시키 카이샤 | Non-weaving cloth and method of the same |
KR100458657B1 (en) * | 1996-12-10 | 2005-04-06 | 닛토덴코 가부시키가이샤 | Cleaning composition for molds for forming semiconductor devices and cleaning method of molds using the same |
JP2007196586A (en) * | 2006-01-27 | 2007-08-09 | Nitto Denko Corp | Mold regenerating sheet |
JP2007196587A (en) * | 2006-01-27 | 2007-08-09 | Nitto Denko Corp | Mold regenerating sheet |
WO2008108327A1 (en) * | 2007-03-05 | 2008-09-12 | Nitto Denko Corporation | Sheet for mold regeneration and method of cleaning mold with the same |
JP2008300856A (en) * | 2008-07-11 | 2008-12-11 | Renesas Technology Corp | Semiconductor device manufacturing method |
-
1979
- 1979-04-13 JP JP4593279A patent/JPS55137914A/en active Pending
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6236834A (en) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | Resin sealing apparatus and method |
WO1987003531A1 (en) * | 1985-12-13 | 1987-06-18 | Pas Ireneus Johannes Theodorus | Method and composite article for cleaning molds |
EP0271107A2 (en) * | 1986-12-11 | 1988-06-15 | Nitto Denko Corporation | Mold cleaning composition, sheet for cleaning mold, and method for cleaning mold using said cleaning sheet |
JPS63148645A (en) * | 1986-12-11 | 1988-06-21 | Kyushu Nitto Denko Kk | Manufacture of semiconductor device |
JPH0195010A (en) * | 1987-10-07 | 1989-04-13 | Matsushita Electron Corp | Cleaning method for molding die |
EP0704292A1 (en) * | 1994-03-30 | 1996-04-03 | Sankyokasei Kabushiki Kaisha | Resin molding method and resin molding machine |
EP0704292A4 (en) * | 1994-03-30 | 1996-12-27 | Sankyokasei Kabushiki Kaisha | Resin molding method and resin molding machine |
JPH07273135A (en) * | 1995-01-05 | 1995-10-20 | Nitto Denko Corp | Manufacture of semiconductor device |
KR100458657B1 (en) * | 1996-12-10 | 2005-04-06 | 닛토덴코 가부시키가이샤 | Cleaning composition for molds for forming semiconductor devices and cleaning method of molds using the same |
CN1058929C (en) * | 1997-03-20 | 2000-11-29 | 超丰电子股份有限公司 | Mold washing method improvement for thermosetting plastic injection forming mold |
JPH11207752A (en) * | 1998-01-26 | 1999-08-03 | Hitachi Ltd | Sheet for preventing oxidation of molding die and method for preventing oxidation of molding die using sheet |
KR20030016022A (en) * | 2001-08-20 | 2003-02-26 | 다이몬지 카부시키 카이샤 | Non-weaving cloth and method of the same |
JP2007196586A (en) * | 2006-01-27 | 2007-08-09 | Nitto Denko Corp | Mold regenerating sheet |
JP2007196587A (en) * | 2006-01-27 | 2007-08-09 | Nitto Denko Corp | Mold regenerating sheet |
WO2008108327A1 (en) * | 2007-03-05 | 2008-09-12 | Nitto Denko Corporation | Sheet for mold regeneration and method of cleaning mold with the same |
JP2008213313A (en) * | 2007-03-05 | 2008-09-18 | Nitto Denko Corp | Sheet for regeneration of mold and mold cleaning method using the sheet |
JP2008300856A (en) * | 2008-07-11 | 2008-12-11 | Renesas Technology Corp | Semiconductor device manufacturing method |
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