JPS55134812A - Optical collection system - Google Patents

Optical collection system

Info

Publication number
JPS55134812A
JPS55134812A JP4342380A JP4342380A JPS55134812A JP S55134812 A JPS55134812 A JP S55134812A JP 4342380 A JP4342380 A JP 4342380A JP 4342380 A JP4342380 A JP 4342380A JP S55134812 A JPS55134812 A JP S55134812A
Authority
JP
Japan
Prior art keywords
collection system
optical collection
optical
collection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4342380A
Other languages
English (en)
Inventor
Eichi Fuiritsupusu Edowaado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optimetrix Corp
Original Assignee
Optimetrix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optimetrix Corp filed Critical Optimetrix Corp
Publication of JPS55134812A publication Critical patent/JPS55134812A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lenses (AREA)
  • Automatic Focus Adjustment (AREA)
JP4342380A 1979-04-02 1980-04-02 Optical collection system Pending JPS55134812A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2591779A 1979-04-02 1979-04-02

Publications (1)

Publication Number Publication Date
JPS55134812A true JPS55134812A (en) 1980-10-21

Family

ID=21828767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4342380A Pending JPS55134812A (en) 1979-04-02 1980-04-02 Optical collection system

Country Status (4)

Country Link
EP (2) EP0017044B1 (ja)
JP (1) JPS55134812A (ja)
CA (1) CA1148392A (ja)
DE (1) DE3070825D1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JPS61125128A (ja) * 1984-11-19 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 工作物の位置決め装置
JPS62198121A (ja) * 1986-02-26 1987-09-01 Toshiba Corp 露光装置
JPH07211632A (ja) * 1994-12-26 1995-08-11 Hitachi Ltd 露光装置

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573791A (en) * 1979-04-03 1986-03-04 Optimetrix Corporation Step-and-repeat projection alignment and exposure system
US4473293A (en) * 1979-04-03 1984-09-25 Optimetrix Corporation Step-and-repeat projection alignment and exposure system
US4597664A (en) * 1980-02-29 1986-07-01 Optimetrix Corporation Step-and-repeat projection alignment and exposure system with auxiliary optical unit
US4452526A (en) * 1980-02-29 1984-06-05 Optimetrix Corporation Step-and-repeat projection alignment and exposure system with auxiliary optical unit
DE3173163D1 (en) * 1980-02-29 1986-01-23 Eaton Optimetrix Inc Alignment apparatus
JPS56130707A (en) * 1980-03-18 1981-10-13 Canon Inc Photo-printing device
US4577958A (en) * 1982-06-18 1986-03-25 Eaton Optimetrix, Inc. Bore-sighted step-and-repeat projection alignment and exposure system
US4577957A (en) * 1983-01-07 1986-03-25 Eaton-Optimetrix, Inc. Bore-sighted step-and-repeat projection alignment and exposure system
JPS59150424A (ja) * 1983-02-14 1984-08-28 Toshiba Corp 半導体装置の製造装置および方法
NL8601095A (nl) * 1986-04-29 1987-11-16 Philips Nv Positioneerinrichting.
CH672376A5 (ja) * 1986-07-12 1989-11-15 Wild Heerbrugg Ag
US20060044533A1 (en) * 2004-08-27 2006-03-02 Asmlholding N.V. System and method for reducing disturbances caused by movement in an immersion lithography system
CN110719449B (zh) * 2019-09-29 2021-12-21 深圳市火乐科技发展有限公司 智能投影仪的对焦方法及相关产品

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3685117A (en) * 1970-05-12 1972-08-22 Jade Corp Alignment fixture
DE2417058A1 (de) * 1974-04-08 1975-10-09 Proebster Jun Nachf C Mikroskop
IT1037606B (it) * 1974-06-06 1979-11-20 Ibm Apparecchiatura ottica perfezionata utile per la fabbricazione di circuiti integrati
FR2330030A1 (fr) * 1975-10-31 1977-05-27 Thomson Csf Nouvel appareil photorepeteur de masques de haute precision

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JPH0564450B2 (ja) * 1984-09-20 1993-09-14 Hitachi Ltd
JPS61125128A (ja) * 1984-11-19 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 工作物の位置決め装置
JPH0722104B2 (ja) * 1984-11-19 1995-03-08 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション 工作物の位置決め装置
JPS62198121A (ja) * 1986-02-26 1987-09-01 Toshiba Corp 露光装置
JPH07211632A (ja) * 1994-12-26 1995-08-11 Hitachi Ltd 露光装置

Also Published As

Publication number Publication date
EP0097380A2 (en) 1984-01-04
EP0097380A3 (en) 1984-08-29
CA1148392A (en) 1983-06-21
EP0017044A3 (en) 1980-12-10
EP0017044B1 (en) 1985-07-03
EP0017044A2 (en) 1980-10-15
DE3070825D1 (en) 1985-08-08

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