JPS55125977A - 4-direction lapping machine - Google Patents

4-direction lapping machine

Info

Publication number
JPS55125977A
JPS55125977A JP12871479A JP12871479A JPS55125977A JP S55125977 A JPS55125977 A JP S55125977A JP 12871479 A JP12871479 A JP 12871479A JP 12871479 A JP12871479 A JP 12871479A JP S55125977 A JPS55125977 A JP S55125977A
Authority
JP
Japan
Prior art keywords
gear section
section
lapping plate
driving
lapped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12871479A
Other languages
English (en)
Inventor
Yasuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamai Co Ltd
Original Assignee
Hamai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamai Co Ltd filed Critical Hamai Co Ltd
Priority to JP12871479A priority Critical patent/JPS55125977A/ja
Publication of JPS55125977A publication Critical patent/JPS55125977A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP12871479A 1979-10-04 1979-10-04 4-direction lapping machine Pending JPS55125977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12871479A JPS55125977A (en) 1979-10-04 1979-10-04 4-direction lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12871479A JPS55125977A (en) 1979-10-04 1979-10-04 4-direction lapping machine

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP51006373A Division JPS6047066B2 (ja) 1976-01-24 1976-01-24 ４方向ラツプ盤

Publications (1)

Publication Number Publication Date
JPS55125977A true JPS55125977A (en) 1980-09-29

Family

ID=14991603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12871479A Pending JPS55125977A (en) 1979-10-04 1979-10-04 4-direction lapping machine

Country Status (1)

Country Link
JP (1) JPS55125977A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60120759U (ja) * 1984-01-24 1985-08-15 株式会社　三英電機製作所 偏心摺動回転型ラツプ盤
JPS60197363A (ja) * 1984-03-16 1985-10-05 Mitsubishi Metal Corp ウエハ−の研磨方法および装置
JPS62255063A (ja) * 1986-04-30 1987-11-06 Speedfam Co Ltd 平面研磨方法及び装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60120759U (ja) * 1984-01-24 1985-08-15 株式会社　三英電機製作所 偏心摺動回転型ラツプ盤
JPH0243654Y2 (ja) * 1984-01-24 1990-11-20
JPS60197363A (ja) * 1984-03-16 1985-10-05 Mitsubishi Metal Corp ウエハ−の研磨方法および装置
JPS62255063A (ja) * 1986-04-30 1987-11-06 Speedfam Co Ltd 平面研磨方法及び装置

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