JPS55117588A - Light beam working apparatus - Google Patents
Light beam working apparatusInfo
- Publication number
- JPS55117588A JPS55117588A JP2477679A JP2477679A JPS55117588A JP S55117588 A JPS55117588 A JP S55117588A JP 2477679 A JP2477679 A JP 2477679A JP 2477679 A JP2477679 A JP 2477679A JP S55117588 A JPS55117588 A JP S55117588A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- moving
- driving
- magne
- centerlines
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Beam Processing (AREA)
Abstract
PURPOSE: To eliminate the effect of mechanical backlash, twist, etc. and errors of position detection and enhance the dimensional accuracy of working patterns by aligning a light beam axis onto the driving axis center of an X-axis moving table and aligning the centerlines of the X- and Y-axes and the respective moving position measurement points.
CONSTITUTION: An X-axis moving table 3 is directly coupled to the actuator 2 of a linear motor 1 and moves in the X direction on an X-axis part supporting table 9. A reflecting mirror and condenser lens 6 which receive the laser beam 22 from a laser oscillator 23 provided on the centerline of the X-axis driving shaft viewed in plan and reflect the same rectangularly downward are mounted to the moving table 3. The lens 6 is variable vertically and condenses the beam to the work 21 through the hole of the table 9. A Y-axis moving table 14 as well moves in the Y direction on the supporting table 15 similarly, and is provided with a mounting table 13 to be placed with the work. The moving tables 3, 14 are fixed with the magne bars 18, 20 of the magne scale for driving position observation on the respective driving axis centerlines and while their positions are being detected, the moving tables are automatically moved.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2477679A JPS55117588A (en) | 1979-03-02 | 1979-03-02 | Light beam working apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2477679A JPS55117588A (en) | 1979-03-02 | 1979-03-02 | Light beam working apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55117588A true JPS55117588A (en) | 1980-09-09 |
Family
ID=12147569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2477679A Pending JPS55117588A (en) | 1979-03-02 | 1979-03-02 | Light beam working apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55117588A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5096997A (en) * | 1973-12-27 | 1975-08-01 | ||
JPS5239893A (en) * | 1975-09-23 | 1977-03-28 | Nec Corp | Device for irradiating a laser beam |
-
1979
- 1979-03-02 JP JP2477679A patent/JPS55117588A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5096997A (en) * | 1973-12-27 | 1975-08-01 | ||
JPS5239893A (en) * | 1975-09-23 | 1977-03-28 | Nec Corp | Device for irradiating a laser beam |
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