JPS55117588A - Light beam working apparatus - Google Patents

Light beam working apparatus

Info

Publication number
JPS55117588A
JPS55117588A JP2477679A JP2477679A JPS55117588A JP S55117588 A JPS55117588 A JP S55117588A JP 2477679 A JP2477679 A JP 2477679A JP 2477679 A JP2477679 A JP 2477679A JP S55117588 A JPS55117588 A JP S55117588A
Authority
JP
Japan
Prior art keywords
axis
moving
driving
magne
centerlines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2477679A
Other languages
Japanese (ja)
Inventor
Sumitaka Kinefuchi
Masaharu Takahara
Osamu Ibaraki
Toshihiro Shintaku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2477679A priority Critical patent/JPS55117588A/en
Publication of JPS55117588A publication Critical patent/JPS55117588A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)

Abstract

PURPOSE: To eliminate the effect of mechanical backlash, twist, etc. and errors of position detection and enhance the dimensional accuracy of working patterns by aligning a light beam axis onto the driving axis center of an X-axis moving table and aligning the centerlines of the X- and Y-axes and the respective moving position measurement points.
CONSTITUTION: An X-axis moving table 3 is directly coupled to the actuator 2 of a linear motor 1 and moves in the X direction on an X-axis part supporting table 9. A reflecting mirror and condenser lens 6 which receive the laser beam 22 from a laser oscillator 23 provided on the centerline of the X-axis driving shaft viewed in plan and reflect the same rectangularly downward are mounted to the moving table 3. The lens 6 is variable vertically and condenses the beam to the work 21 through the hole of the table 9. A Y-axis moving table 14 as well moves in the Y direction on the supporting table 15 similarly, and is provided with a mounting table 13 to be placed with the work. The moving tables 3, 14 are fixed with the magne bars 18, 20 of the magne scale for driving position observation on the respective driving axis centerlines and while their positions are being detected, the moving tables are automatically moved.
COPYRIGHT: (C)1980,JPO&Japio
JP2477679A 1979-03-02 1979-03-02 Light beam working apparatus Pending JPS55117588A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2477679A JPS55117588A (en) 1979-03-02 1979-03-02 Light beam working apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2477679A JPS55117588A (en) 1979-03-02 1979-03-02 Light beam working apparatus

Publications (1)

Publication Number Publication Date
JPS55117588A true JPS55117588A (en) 1980-09-09

Family

ID=12147569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2477679A Pending JPS55117588A (en) 1979-03-02 1979-03-02 Light beam working apparatus

Country Status (1)

Country Link
JP (1) JPS55117588A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5096997A (en) * 1973-12-27 1975-08-01
JPS5239893A (en) * 1975-09-23 1977-03-28 Nec Corp Device for irradiating a laser beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5096997A (en) * 1973-12-27 1975-08-01
JPS5239893A (en) * 1975-09-23 1977-03-28 Nec Corp Device for irradiating a laser beam

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