JPS55115254A - Power source for ion pump - Google Patents

Power source for ion pump

Info

Publication number
JPS55115254A
JPS55115254A JP2277479A JP2277479A JPS55115254A JP S55115254 A JPS55115254 A JP S55115254A JP 2277479 A JP2277479 A JP 2277479A JP 2277479 A JP2277479 A JP 2277479A JP S55115254 A JPS55115254 A JP S55115254A
Authority
JP
Japan
Prior art keywords
ion pump
voltage
power source
pump cell
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2277479A
Other languages
Japanese (ja)
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2277479A priority Critical patent/JPS55115254A/en
Publication of JPS55115254A publication Critical patent/JPS55115254A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To permit the easy supply of ion pump voltage from ground potential portion by supplying high voltage for discharge to ion pump high-resistor alone.
CONSTITUTION: High voltage generated at the upper end of the DC high-voltage generating circuit 22 is supplied to the electron gun 23. The high-resistors 24a and 24b of equal resistance values are connected to each other in parallel, and its higher pressure side is connected to the ion pump cell 25 whose high-pressure power source 26 is connected to the lower pressure side of the high resistor 24a. The voltage- limiting element 27 connected in parallel to the ion pump cell 25 prevents the application of more than a given voltage to the ion pump cell 25.
COPYRIGHT: (C)1980,JPO&Japio
JP2277479A 1979-02-28 1979-02-28 Power source for ion pump Pending JPS55115254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2277479A JPS55115254A (en) 1979-02-28 1979-02-28 Power source for ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2277479A JPS55115254A (en) 1979-02-28 1979-02-28 Power source for ion pump

Publications (1)

Publication Number Publication Date
JPS55115254A true JPS55115254A (en) 1980-09-05

Family

ID=12092006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2277479A Pending JPS55115254A (en) 1979-02-28 1979-02-28 Power source for ion pump

Country Status (1)

Country Link
JP (1) JPS55115254A (en)

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