JPS55113919A - High frequency heater - Google Patents

High frequency heater

Info

Publication number
JPS55113919A
JPS55113919A JP2126879A JP2126879A JPS55113919A JP S55113919 A JPS55113919 A JP S55113919A JP 2126879 A JP2126879 A JP 2126879A JP 2126879 A JP2126879 A JP 2126879A JP S55113919 A JPS55113919 A JP S55113919A
Authority
JP
Japan
Prior art keywords
heated piece
infrared ray
heating chamber
infrared rays
rays emitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2126879A
Other languages
Japanese (ja)
Inventor
Shunichi Nagamoto
Yasuteru Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2126879A priority Critical patent/JPS55113919A/en
Publication of JPS55113919A publication Critical patent/JPS55113919A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)

Abstract

PURPOSE:To accurately detect the mean temperature of a heated piece, by providing a plurality of infrared ray detection windows in the wall of a metal heating chamber and determining the temperature of the heated piece from the infrared rays transmitted to infrared ray sensors through the detection windows. CONSTITUTION:Infrared rays emitted mainly from the side face of a heated piece 3 through the first infrared ray detection window 6 in the wall 1a of a heating chamber 1 are detected by the first infrared ray sensor 7 provided outside the heating chamber. Since the heated piece 3 is rotated together with a rotary stage 4, the first sensor 7 detects the infrared rays emitted from the entire side face of the heated piece 3. The second infrared ray detection window 8 is provided in the ceiling 1b of the heating chamber 1. The second infrared ray sensor 9 is installed outside the second window to detect infrared rays emitted from the top of the heated piece 3. Detection signals are applied to a control circuit 12. Because the infrared rays emitted from the top and entire side face of the heated piece 3 are detected, its accurate mean temperature can be determined.
JP2126879A 1979-02-23 1979-02-23 High frequency heater Pending JPS55113919A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2126879A JPS55113919A (en) 1979-02-23 1979-02-23 High frequency heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2126879A JPS55113919A (en) 1979-02-23 1979-02-23 High frequency heater

Publications (1)

Publication Number Publication Date
JPS55113919A true JPS55113919A (en) 1980-09-02

Family

ID=12050355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2126879A Pending JPS55113919A (en) 1979-02-23 1979-02-23 High frequency heater

Country Status (1)

Country Link
JP (1) JPS55113919A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932721A (en) * 1982-08-19 1984-02-22 Matsushita Electric Ind Co Ltd High frequency heater
JPS60129528A (en) * 1983-12-19 1985-07-10 Matsushita Electric Ind Co Ltd Heating cooker
JPS6194911U (en) * 1984-11-27 1986-06-19
EP0459305A2 (en) * 1990-06-01 1991-12-04 Matsushita Electric Industrial Co., Ltd. High-frequency heating apparatus
US10763141B2 (en) * 2017-03-17 2020-09-01 Applied Materials, Inc. Non-contact temperature calibration tool for a substrate support and method of using the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5932721A (en) * 1982-08-19 1984-02-22 Matsushita Electric Ind Co Ltd High frequency heater
JPS60129528A (en) * 1983-12-19 1985-07-10 Matsushita Electric Ind Co Ltd Heating cooker
JPH0230411B2 (en) * 1983-12-19 1990-07-06 Matsushita Electric Ind Co Ltd
JPS6194911U (en) * 1984-11-27 1986-06-19
EP0459305A2 (en) * 1990-06-01 1991-12-04 Matsushita Electric Industrial Co., Ltd. High-frequency heating apparatus
EP0459305A3 (en) * 1990-06-01 1993-01-20 Matsushita Electric Industrial Co., Ltd. High-frequency heating apparatus
US10763141B2 (en) * 2017-03-17 2020-09-01 Applied Materials, Inc. Non-contact temperature calibration tool for a substrate support and method of using the same

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