JPS55109958A - Mass spectrometer - Google Patents

Mass spectrometer

Info

Publication number
JPS55109958A
JPS55109958A JP1731279A JP1731279A JPS55109958A JP S55109958 A JPS55109958 A JP S55109958A JP 1731279 A JP1731279 A JP 1731279A JP 1731279 A JP1731279 A JP 1731279A JP S55109958 A JPS55109958 A JP S55109958A
Authority
JP
Japan
Prior art keywords
leak
vacuum gauge
power supply
exhaustion
leading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1731279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631541B2 (enrdf_load_stackoverflow
Inventor
Eiichi Izumi
Sadao Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1731279A priority Critical patent/JPS55109958A/ja
Publication of JPS55109958A publication Critical patent/JPS55109958A/ja
Publication of JPS631541B2 publication Critical patent/JPS631541B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP1731279A 1979-02-19 1979-02-19 Mass spectrometer Granted JPS55109958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1731279A JPS55109958A (en) 1979-02-19 1979-02-19 Mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1731279A JPS55109958A (en) 1979-02-19 1979-02-19 Mass spectrometer

Publications (2)

Publication Number Publication Date
JPS55109958A true JPS55109958A (en) 1980-08-23
JPS631541B2 JPS631541B2 (enrdf_load_stackoverflow) 1988-01-13

Family

ID=11940482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1731279A Granted JPS55109958A (en) 1979-02-19 1979-02-19 Mass spectrometer

Country Status (1)

Country Link
JP (1) JPS55109958A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60114957U (ja) * 1984-01-13 1985-08-03 日本電子株式会社 ガスクロマトグラフ−質量分析装置
JPS60184260U (ja) * 1984-05-17 1985-12-06 横河電機株式会社 質量分析計用差動排気系
JP2023164328A (ja) * 2022-04-28 2023-11-10 株式会社島津製作所 質量分析装置及びその真空系の形成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120591A (en) * 1977-03-30 1978-10-21 Hitachi Ltd Direct sample introducer of mass spectrometer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120591A (en) * 1977-03-30 1978-10-21 Hitachi Ltd Direct sample introducer of mass spectrometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60114957U (ja) * 1984-01-13 1985-08-03 日本電子株式会社 ガスクロマトグラフ−質量分析装置
JPS60184260U (ja) * 1984-05-17 1985-12-06 横河電機株式会社 質量分析計用差動排気系
JP2023164328A (ja) * 2022-04-28 2023-11-10 株式会社島津製作所 質量分析装置及びその真空系の形成方法

Also Published As

Publication number Publication date
JPS631541B2 (enrdf_load_stackoverflow) 1988-01-13

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