JPS55109783A - Device for preventing gas leakage of shaft seal portion of reciprocating vacuum pump - Google Patents
Device for preventing gas leakage of shaft seal portion of reciprocating vacuum pumpInfo
- Publication number
- JPS55109783A JPS55109783A JP1768579A JP1768579A JPS55109783A JP S55109783 A JPS55109783 A JP S55109783A JP 1768579 A JP1768579 A JP 1768579A JP 1768579 A JP1768579 A JP 1768579A JP S55109783 A JPS55109783 A JP S55109783A
- Authority
- JP
- Japan
- Prior art keywords
- piece
- vacuum pump
- gas leakage
- case
- final
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prevent the gas through shaft real, by providing a device having three chambers define by distance pieces communicating with reccessive ones, the final chamber being charged with nitrogen gas and maintained at a pressure slightly higher than the atmospheric pressure.
CONSTITUTION: Three distance pieces 14W16 are provided between the final stage cylinder 11 and a crank case 17 to form a sealing box. A vacuum pump 1 is operated, communication is made between the first piece 14 and the inlet side of the suction valve 111 of a final cylinder 11 for uniforming the vacuum degree of the both, the next piece 15 is evacuated via a filter for making the vacuum degree thereof somewhat lower than that of the first piece 14. Thereby, the internal pressure of the third piece 16 is made somewhat higher than the atmospheric pressure in the case 17 by supplying nitrogen gas. Consequently, the leak of the case 17 into a shaft sealing portion 17 and chamber 16 is prevented so that the reactive gas leakage of the portion 171 can be avoided.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1768579A JPS5925120B2 (en) | 1979-02-18 | 1979-02-18 | Reciprocating vacuum pump shaft seal gas leak prevention device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1768579A JPS5925120B2 (en) | 1979-02-18 | 1979-02-18 | Reciprocating vacuum pump shaft seal gas leak prevention device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55109783A true JPS55109783A (en) | 1980-08-23 |
JPS5925120B2 JPS5925120B2 (en) | 1984-06-14 |
Family
ID=11950674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1768579A Expired JPS5925120B2 (en) | 1979-02-18 | 1979-02-18 | Reciprocating vacuum pump shaft seal gas leak prevention device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5925120B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105649953A (en) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Gas path system used for multi-level dry vacuum pump |
-
1979
- 1979-02-18 JP JP1768579A patent/JPS5925120B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5925120B2 (en) | 1984-06-14 |
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