JPS55109783A - Device for preventing gas leakage of shaft seal portion of reciprocating vacuum pump - Google Patents

Device for preventing gas leakage of shaft seal portion of reciprocating vacuum pump

Info

Publication number
JPS55109783A
JPS55109783A JP1768579A JP1768579A JPS55109783A JP S55109783 A JPS55109783 A JP S55109783A JP 1768579 A JP1768579 A JP 1768579A JP 1768579 A JP1768579 A JP 1768579A JP S55109783 A JPS55109783 A JP S55109783A
Authority
JP
Japan
Prior art keywords
piece
vacuum pump
gas leakage
case
final
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1768579A
Other languages
Japanese (ja)
Other versions
JPS5925120B2 (en
Inventor
Kazunori Wakizaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIKUNI JUKOGYO
MIKUNI JUKOGYO KK
Original Assignee
MIKUNI JUKOGYO
MIKUNI JUKOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIKUNI JUKOGYO, MIKUNI JUKOGYO KK filed Critical MIKUNI JUKOGYO
Priority to JP1768579A priority Critical patent/JPS5925120B2/en
Publication of JPS55109783A publication Critical patent/JPS55109783A/en
Publication of JPS5925120B2 publication Critical patent/JPS5925120B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the gas through shaft real, by providing a device having three chambers define by distance pieces communicating with reccessive ones, the final chamber being charged with nitrogen gas and maintained at a pressure slightly higher than the atmospheric pressure.
CONSTITUTION: Three distance pieces 14W16 are provided between the final stage cylinder 11 and a crank case 17 to form a sealing box. A vacuum pump 1 is operated, communication is made between the first piece 14 and the inlet side of the suction valve 111 of a final cylinder 11 for uniforming the vacuum degree of the both, the next piece 15 is evacuated via a filter for making the vacuum degree thereof somewhat lower than that of the first piece 14. Thereby, the internal pressure of the third piece 16 is made somewhat higher than the atmospheric pressure in the case 17 by supplying nitrogen gas. Consequently, the leak of the case 17 into a shaft sealing portion 17 and chamber 16 is prevented so that the reactive gas leakage of the portion 171 can be avoided.
COPYRIGHT: (C)1980,JPO&Japio
JP1768579A 1979-02-18 1979-02-18 Reciprocating vacuum pump shaft seal gas leak prevention device Expired JPS5925120B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1768579A JPS5925120B2 (en) 1979-02-18 1979-02-18 Reciprocating vacuum pump shaft seal gas leak prevention device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1768579A JPS5925120B2 (en) 1979-02-18 1979-02-18 Reciprocating vacuum pump shaft seal gas leak prevention device

Publications (2)

Publication Number Publication Date
JPS55109783A true JPS55109783A (en) 1980-08-23
JPS5925120B2 JPS5925120B2 (en) 1984-06-14

Family

ID=11950674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1768579A Expired JPS5925120B2 (en) 1979-02-18 1979-02-18 Reciprocating vacuum pump shaft seal gas leak prevention device

Country Status (1)

Country Link
JP (1) JPS5925120B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105649953A (en) * 2014-11-11 2016-06-08 中国科学院沈阳科学仪器股份有限公司 Gas path system used for multi-level dry vacuum pump

Also Published As

Publication number Publication date
JPS5925120B2 (en) 1984-06-14

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