JPS5510975B2 - - Google Patents
Info
- Publication number
- JPS5510975B2 JPS5510975B2 JP7098276A JP7098276A JPS5510975B2 JP S5510975 B2 JPS5510975 B2 JP S5510975B2 JP 7098276 A JP7098276 A JP 7098276A JP 7098276 A JP7098276 A JP 7098276A JP S5510975 B2 JPS5510975 B2 JP S5510975B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7098276A JPS52154360A (en) | 1976-06-18 | 1976-06-18 | Device for high pressure oxidatioon diffusion for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7098276A JPS52154360A (en) | 1976-06-18 | 1976-06-18 | Device for high pressure oxidatioon diffusion for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52154360A JPS52154360A (en) | 1977-12-22 |
| JPS5510975B2 true JPS5510975B2 (ja) | 1980-03-21 |
Family
ID=13447231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7098276A Granted JPS52154360A (en) | 1976-06-18 | 1976-06-18 | Device for high pressure oxidatioon diffusion for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52154360A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5583226A (en) * | 1978-12-19 | 1980-06-23 | Fujitsu Ltd | Gas phase growing device |
| JPH0369120A (ja) * | 1989-08-08 | 1991-03-25 | Nec Yamagata Ltd | 高圧酸化炉 |
| JP2585962B2 (ja) * | 1993-11-25 | 1997-02-26 | 東京エレクトロン株式会社 | 高圧酸化炉 |
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1976
- 1976-06-18 JP JP7098276A patent/JPS52154360A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52154360A (en) | 1977-12-22 |