JPS52154360A - Device for high pressure oxidatioon diffusion for semiconductor - Google Patents

Device for high pressure oxidatioon diffusion for semiconductor

Info

Publication number
JPS52154360A
JPS52154360A JP7098276A JP7098276A JPS52154360A JP S52154360 A JPS52154360 A JP S52154360A JP 7098276 A JP7098276 A JP 7098276A JP 7098276 A JP7098276 A JP 7098276A JP S52154360 A JPS52154360 A JP S52154360A
Authority
JP
Japan
Prior art keywords
oxidatioon
diffusion
semiconductor
high pressure
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7098276A
Other languages
Japanese (ja)
Other versions
JPS5510975B2 (en
Inventor
Riyouzou Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP7098276A priority Critical patent/JPS52154360A/en
Publication of JPS52154360A publication Critical patent/JPS52154360A/en
Publication of JPS5510975B2 publication Critical patent/JPS5510975B2/ja
Granted legal-status Critical Current

Links

JP7098276A 1976-06-18 1976-06-18 Device for high pressure oxidatioon diffusion for semiconductor Granted JPS52154360A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7098276A JPS52154360A (en) 1976-06-18 1976-06-18 Device for high pressure oxidatioon diffusion for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7098276A JPS52154360A (en) 1976-06-18 1976-06-18 Device for high pressure oxidatioon diffusion for semiconductor

Publications (2)

Publication Number Publication Date
JPS52154360A true JPS52154360A (en) 1977-12-22
JPS5510975B2 JPS5510975B2 (en) 1980-03-21

Family

ID=13447231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7098276A Granted JPS52154360A (en) 1976-06-18 1976-06-18 Device for high pressure oxidatioon diffusion for semiconductor

Country Status (1)

Country Link
JP (1) JPS52154360A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583226A (en) * 1978-12-19 1980-06-23 Fujitsu Ltd Gas phase growing device
JPH0369120A (en) * 1989-08-08 1991-03-25 Nec Yamagata Ltd High-pressure oxidation furnace
JPH06204210A (en) * 1993-11-25 1994-07-22 Tokyo Electron Tohoku Ltd Method and furnace for high pressure oxidation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5583226A (en) * 1978-12-19 1980-06-23 Fujitsu Ltd Gas phase growing device
JPH0369120A (en) * 1989-08-08 1991-03-25 Nec Yamagata Ltd High-pressure oxidation furnace
JPH06204210A (en) * 1993-11-25 1994-07-22 Tokyo Electron Tohoku Ltd Method and furnace for high pressure oxidation

Also Published As

Publication number Publication date
JPS5510975B2 (en) 1980-03-21

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