JPS52154360A - Device for high pressure oxidatioon diffusion for semiconductor - Google Patents
Device for high pressure oxidatioon diffusion for semiconductorInfo
- Publication number
- JPS52154360A JPS52154360A JP7098276A JP7098276A JPS52154360A JP S52154360 A JPS52154360 A JP S52154360A JP 7098276 A JP7098276 A JP 7098276A JP 7098276 A JP7098276 A JP 7098276A JP S52154360 A JPS52154360 A JP S52154360A
- Authority
- JP
- Japan
- Prior art keywords
- oxidatioon
- diffusion
- semiconductor
- high pressure
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7098276A JPS52154360A (en) | 1976-06-18 | 1976-06-18 | Device for high pressure oxidatioon diffusion for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7098276A JPS52154360A (en) | 1976-06-18 | 1976-06-18 | Device for high pressure oxidatioon diffusion for semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52154360A true JPS52154360A (en) | 1977-12-22 |
JPS5510975B2 JPS5510975B2 (en) | 1980-03-21 |
Family
ID=13447231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7098276A Granted JPS52154360A (en) | 1976-06-18 | 1976-06-18 | Device for high pressure oxidatioon diffusion for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52154360A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583226A (en) * | 1978-12-19 | 1980-06-23 | Fujitsu Ltd | Gas phase growing device |
JPH0369120A (en) * | 1989-08-08 | 1991-03-25 | Nec Yamagata Ltd | High-pressure oxidation furnace |
JPH06204210A (en) * | 1993-11-25 | 1994-07-22 | Tokyo Electron Tohoku Ltd | Method and furnace for high pressure oxidation |
-
1976
- 1976-06-18 JP JP7098276A patent/JPS52154360A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5583226A (en) * | 1978-12-19 | 1980-06-23 | Fujitsu Ltd | Gas phase growing device |
JPH0369120A (en) * | 1989-08-08 | 1991-03-25 | Nec Yamagata Ltd | High-pressure oxidation furnace |
JPH06204210A (en) * | 1993-11-25 | 1994-07-22 | Tokyo Electron Tohoku Ltd | Method and furnace for high pressure oxidation |
Also Published As
Publication number | Publication date |
---|---|
JPS5510975B2 (en) | 1980-03-21 |
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