JPS55108736A - Method for maintenance of electron beam exposure device - Google Patents

Method for maintenance of electron beam exposure device

Info

Publication number
JPS55108736A
JPS55108736A JP1559679A JP1559679A JPS55108736A JP S55108736 A JPS55108736 A JP S55108736A JP 1559679 A JP1559679 A JP 1559679A JP 1559679 A JP1559679 A JP 1559679A JP S55108736 A JPS55108736 A JP S55108736A
Authority
JP
Japan
Prior art keywords
lubricant
electron beam
gas
maintenance
lubricant oil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1559679A
Other languages
Japanese (ja)
Other versions
JPH0330257B2 (en
Inventor
Toshihiko Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1559679A priority Critical patent/JPS55108736A/en
Publication of JPS55108736A publication Critical patent/JPS55108736A/en
Publication of JPH0330257B2 publication Critical patent/JPH0330257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details

Abstract

PURPOSE:To eliminate charge up to be caused by lubricant oil by coating synthetic fluorine lubricant on mechanically sliding parts in a vacuum tank of an electron beam exposure device. CONSTITUTION:Synthetic fluorine lubricant is a lubricant oil devloped from the consideration of the fact that fluorine resin has a low friction coefficient and that it has no tackiness. It has relatively low cohesive energy, smaller than 1800(calmol<-1>) as expressed by Equation I. For maintenance, the sliding parts in the movable structures of the device are throughly cleaned and then they are coated with thin synthetic fluorine lubricant oil. As a result, even if a minute quantity of lubricant is evaporated, when it is exposed to an electron beam, it is decomposed into CF2 gas, CF3 gas, and O2 gas, and these gases are sucked into a exhaust device connected to vacuum tank 1 and are removed.
JP1559679A 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device Granted JPS55108736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1559679A JPS55108736A (en) 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1559679A JPS55108736A (en) 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS55108736A true JPS55108736A (en) 1980-08-21
JPH0330257B2 JPH0330257B2 (en) 1991-04-26

Family

ID=11893092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1559679A Granted JPS55108736A (en) 1979-02-13 1979-02-13 Method for maintenance of electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS55108736A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4734960U (en) * 1971-05-14 1972-12-19
JPS5216561A (en) * 1975-07-30 1977-02-07 Montedison Spa Selected perfluoroopolyether oil having extra high purity and low volatility

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4734960U (en) * 1971-05-14 1972-12-19
JPS5216561A (en) * 1975-07-30 1977-02-07 Montedison Spa Selected perfluoroopolyether oil having extra high purity and low volatility

Also Published As

Publication number Publication date
JPH0330257B2 (en) 1991-04-26

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