JPS5510096B2 - - Google Patents

Info

Publication number
JPS5510096B2
JPS5510096B2 JP6358075A JP6358075A JPS5510096B2 JP S5510096 B2 JPS5510096 B2 JP S5510096B2 JP 6358075 A JP6358075 A JP 6358075A JP 6358075 A JP6358075 A JP 6358075A JP S5510096 B2 JPS5510096 B2 JP S5510096B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6358075A
Other languages
Japanese (ja)
Other versions
JPS513571A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS513571A publication Critical patent/JPS513571A/ja
Publication of JPS5510096B2 publication Critical patent/JPS5510096B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/10—Non-vacuum electron beam-welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6358075A 1974-05-30 1975-05-29 Guroohodennyotsute denshibiimuohatsuseisuru gasuhodendenshiju Granted JPS513571A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407253A NL7407253A (nl) 1974-05-30 1974-05-30 Gasontladingselektronenkanon voor het opwekken van een elektronenbundel met behulp van een glimontlading.

Publications (2)

Publication Number Publication Date
JPS513571A JPS513571A (en) 1976-01-13
JPS5510096B2 true JPS5510096B2 (fr) 1980-03-13

Family

ID=19821457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6358075A Granted JPS513571A (en) 1974-05-30 1975-05-29 Guroohodennyotsute denshibiimuohatsuseisuru gasuhodendenshiju

Country Status (9)

Country Link
JP (1) JPS513571A (fr)
AT (1) AT335579B (fr)
CA (1) CA1032633A (fr)
CH (1) CH581389A5 (fr)
DE (1) DE2522072A1 (fr)
FR (1) FR2275874A1 (fr)
GB (1) GB1517952A (fr)
NL (1) NL7407253A (fr)
SE (1) SE401425B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492586A1 (fr) * 1980-10-20 1982-04-23 V Elektrotekhnichesky Procede de commande d'un canon electronique a decharge gazeuse
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
US20200260712A1 (en) 2019-02-15 2020-08-20 Novelty Manufacturing Co. Insect trap

Also Published As

Publication number Publication date
ATA407575A (de) 1976-07-15
SE401425B (sv) 1978-05-02
FR2275874B1 (fr) 1979-06-15
FR2275874A1 (fr) 1976-01-16
CH581389A5 (fr) 1976-10-29
JPS513571A (en) 1976-01-13
GB1517952A (en) 1978-07-19
CA1032633A (fr) 1978-06-06
NL7407253A (nl) 1975-12-02
AT335579B (de) 1977-03-25
DE2522072A1 (de) 1975-12-11

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