JPS5497358A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5497358A
JPS5497358A JP403978A JP403978A JPS5497358A JP S5497358 A JPS5497358 A JP S5497358A JP 403978 A JP403978 A JP 403978A JP 403978 A JP403978 A JP 403978A JP S5497358 A JPS5497358 A JP S5497358A
Authority
JP
Japan
Prior art keywords
electron
lens
focusing
readjustments
lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP403978A
Other languages
English (en)
Other versions
JPS5853468B2 (ja
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53004039A priority Critical patent/JPS5853468B2/ja
Publication of JPS5497358A publication Critical patent/JPS5497358A/ja
Publication of JPS5853468B2 publication Critical patent/JPS5853468B2/ja
Expired legal-status Critical Current

Links

JP53004039A 1978-01-18 1978-01-18 走査電子顕微鏡 Expired JPS5853468B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53004039A JPS5853468B2 (ja) 1978-01-18 1978-01-18 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53004039A JPS5853468B2 (ja) 1978-01-18 1978-01-18 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5497358A true JPS5497358A (en) 1979-08-01
JPS5853468B2 JPS5853468B2 (ja) 1983-11-29

Family

ID=11573804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53004039A Expired JPS5853468B2 (ja) 1978-01-18 1978-01-18 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5853468B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109061U (ja) * 1983-01-12 1984-07-23 日立精工株式会社 電子ビ−ム溶接装置
JPS63218135A (ja) * 1986-11-13 1988-09-12 Akashi Seisakusho Co Ltd 走査電子顕微鏡
JP2012018812A (ja) * 2010-07-08 2012-01-26 Keyence Corp 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58179756U (ja) * 1982-05-25 1983-12-01 三洋電機株式会社 プリント基板用の電池ユニツト

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5286355A (en) * 1976-01-13 1977-07-18 Toshiba Corp System for three-dimensionally locating segment of line

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5286355A (en) * 1976-01-13 1977-07-18 Toshiba Corp System for three-dimensionally locating segment of line

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59109061U (ja) * 1983-01-12 1984-07-23 日立精工株式会社 電子ビ−ム溶接装置
JPS63218135A (ja) * 1986-11-13 1988-09-12 Akashi Seisakusho Co Ltd 走査電子顕微鏡
JP2012018812A (ja) * 2010-07-08 2012-01-26 Keyence Corp 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体

Also Published As

Publication number Publication date
JPS5853468B2 (ja) 1983-11-29

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