JPS5497358A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS5497358A JPS5497358A JP403978A JP403978A JPS5497358A JP S5497358 A JPS5497358 A JP S5497358A JP 403978 A JP403978 A JP 403978A JP 403978 A JP403978 A JP 403978A JP S5497358 A JPS5497358 A JP S5497358A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- lens
- focusing
- readjustments
- lenses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53004039A JPS5853468B2 (ja) | 1978-01-18 | 1978-01-18 | 走査電子顕微鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53004039A JPS5853468B2 (ja) | 1978-01-18 | 1978-01-18 | 走査電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5497358A true JPS5497358A (en) | 1979-08-01 |
JPS5853468B2 JPS5853468B2 (ja) | 1983-11-29 |
Family
ID=11573804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53004039A Expired JPS5853468B2 (ja) | 1978-01-18 | 1978-01-18 | 走査電子顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5853468B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59109061U (ja) * | 1983-01-12 | 1984-07-23 | 日立精工株式会社 | 電子ビ−ム溶接装置 |
JPS63218135A (ja) * | 1986-11-13 | 1988-09-12 | Akashi Seisakusho Co Ltd | 走査電子顕微鏡 |
JP2012018812A (ja) * | 2010-07-08 | 2012-01-26 | Keyence Corp | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58179756U (ja) * | 1982-05-25 | 1983-12-01 | 三洋電機株式会社 | プリント基板用の電池ユニツト |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5286355A (en) * | 1976-01-13 | 1977-07-18 | Toshiba Corp | System for three-dimensionally locating segment of line |
-
1978
- 1978-01-18 JP JP53004039A patent/JPS5853468B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5286355A (en) * | 1976-01-13 | 1977-07-18 | Toshiba Corp | System for three-dimensionally locating segment of line |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59109061U (ja) * | 1983-01-12 | 1984-07-23 | 日立精工株式会社 | 電子ビ−ム溶接装置 |
JPS63218135A (ja) * | 1986-11-13 | 1988-09-12 | Akashi Seisakusho Co Ltd | 走査電子顕微鏡 |
JP2012018812A (ja) * | 2010-07-08 | 2012-01-26 | Keyence Corp | 拡大観察装置及び拡大観察方法、拡大観察用プログラム並びにコンピュータで読み取り可能な記録媒体 |
Also Published As
Publication number | Publication date |
---|---|
JPS5853468B2 (ja) | 1983-11-29 |
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