JPS549592B2 - - Google Patents
Info
- Publication number
- JPS549592B2 JPS549592B2 JP7631272A JP7631272A JPS549592B2 JP S549592 B2 JPS549592 B2 JP S549592B2 JP 7631272 A JP7631272 A JP 7631272A JP 7631272 A JP7631272 A JP 7631272A JP S549592 B2 JPS549592 B2 JP S549592B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7631272A JPS549592B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-29 | 1972-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7631272A JPS549592B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-29 | 1972-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4933890A JPS4933890A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-28 |
| JPS549592B2 true JPS549592B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-04-25 |
Family
ID=13601841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7631272A Expired JPS549592B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-07-29 | 1972-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS549592B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5732105B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-03-29 | 1982-07-08 | ||
| JPS571586B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-05-22 | 1982-01-12 | ||
| JPS5520743Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-10-21 | 1980-05-19 | ||
| JPS51101735A (ja) * | 1975-03-06 | 1976-09-08 | Sumitomo Bakelite Co | Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho |
| JPS51115287A (en) * | 1975-04-03 | 1976-10-09 | Matsushita Electric Ind Co Ltd | Method of preparing compound film |
| JPS5210869A (en) * | 1975-07-15 | 1977-01-27 | Toshinori Takagi | Thin film forming method |
| JPS52103978A (en) * | 1976-02-25 | 1977-08-31 | Sharp Corp | Manufacture of conduction body in semiconductor device |
| JPS53114786A (en) * | 1977-03-18 | 1978-10-06 | Toko Inc | Method of manufacturing zinc oxide thin film |
| JPS584920Y2 (ja) * | 1978-08-23 | 1983-01-27 | 東光株式会社 | 酸化亜鉛薄膜の製造装置 |
| JPS55132535A (en) * | 1979-04-02 | 1980-10-15 | Sekisui Chem Co Ltd | Manufacture of magnetic recording medium |
| JPS57195333A (en) * | 1981-05-25 | 1982-12-01 | Sekisui Chem Co Ltd | Manufacture of magnetic recording medium |
| JPS60124918A (ja) * | 1983-12-12 | 1985-07-04 | Mitsubishi Electric Corp | 薄膜蒸着装置 |
| JPS6223103A (ja) * | 1985-07-23 | 1987-01-31 | Mitsubishi Electric Corp | 薄膜付着装置 |
| JP2008311231A (ja) * | 2008-06-26 | 2008-12-25 | Seiko Epson Corp | 膜形成装置、電子装置の製造方法及び電気光学装置の製造方法 |
-
1972
- 1972-07-29 JP JP7631272A patent/JPS549592B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4933890A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-28 |