JPS549471B2 - - Google Patents
Info
- Publication number
- JPS549471B2 JPS549471B2 JP6831571A JP6831571A JPS549471B2 JP S549471 B2 JPS549471 B2 JP S549471B2 JP 6831571 A JP6831571 A JP 6831571A JP 6831571 A JP6831571 A JP 6831571A JP S549471 B2 JPS549471 B2 JP S549471B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6831571A JPS549471B2 (https=) | 1971-09-04 | 1971-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6831571A JPS549471B2 (https=) | 1971-09-04 | 1971-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4834482A JPS4834482A (https=) | 1973-05-18 |
| JPS549471B2 true JPS549471B2 (https=) | 1979-04-24 |
Family
ID=13370247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6831571A Expired JPS549471B2 (https=) | 1971-09-04 | 1971-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS549471B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51157512U (https=) * | 1975-06-10 | 1976-12-15 | ||
| JPS5279861U (https=) * | 1975-12-11 | 1977-06-14 | ||
| JPS5552673Y2 (https=) * | 1975-12-20 | 1980-12-06 | ||
| JPS5492534A (en) * | 1977-12-28 | 1979-07-21 | Fujitsu Ltd | Plasma treating device |
| JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |
-
1971
- 1971-09-04 JP JP6831571A patent/JPS549471B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4834482A (https=) | 1973-05-18 |