JPS5552673Y2 - - Google Patents
Info
- Publication number
- JPS5552673Y2 JPS5552673Y2 JP1975173405U JP17340575U JPS5552673Y2 JP S5552673 Y2 JPS5552673 Y2 JP S5552673Y2 JP 1975173405 U JP1975173405 U JP 1975173405U JP 17340575 U JP17340575 U JP 17340575U JP S5552673 Y2 JPS5552673 Y2 JP S5552673Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975173405U JPS5552673Y2 (https=) | 1975-12-20 | 1975-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975173405U JPS5552673Y2 (https=) | 1975-12-20 | 1975-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5285371U JPS5285371U (https=) | 1977-06-25 |
| JPS5552673Y2 true JPS5552673Y2 (https=) | 1980-12-06 |
Family
ID=28651811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975173405U Expired JPS5552673Y2 (https=) | 1975-12-20 | 1975-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5552673Y2 (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS549471B2 (https=) * | 1971-09-04 | 1979-04-24 |
-
1975
- 1975-12-20 JP JP1975173405U patent/JPS5552673Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5285371U (https=) | 1977-06-25 |