JPS5490968A - Semiconductor diffusion furnace reactive tube - Google Patents

Semiconductor diffusion furnace reactive tube

Info

Publication number
JPS5490968A
JPS5490968A JP15987777A JP15987777A JPS5490968A JP S5490968 A JPS5490968 A JP S5490968A JP 15987777 A JP15987777 A JP 15987777A JP 15987777 A JP15987777 A JP 15987777A JP S5490968 A JPS5490968 A JP S5490968A
Authority
JP
Japan
Prior art keywords
diffusion furnace
semiconductor diffusion
reactive tube
furnace reactive
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15987777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145853B2 (enrdf_load_stackoverflow
Inventor
Hideyasu Matsuo
Chiaki Nakayama
Takayuki Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP15987777A priority Critical patent/JPS5490968A/ja
Publication of JPS5490968A publication Critical patent/JPS5490968A/ja
Publication of JPS6145853B2 publication Critical patent/JPS6145853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP15987777A 1977-12-27 1977-12-27 Semiconductor diffusion furnace reactive tube Granted JPS5490968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15987777A JPS5490968A (en) 1977-12-27 1977-12-27 Semiconductor diffusion furnace reactive tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15987777A JPS5490968A (en) 1977-12-27 1977-12-27 Semiconductor diffusion furnace reactive tube

Publications (2)

Publication Number Publication Date
JPS5490968A true JPS5490968A (en) 1979-07-19
JPS6145853B2 JPS6145853B2 (enrdf_load_stackoverflow) 1986-10-09

Family

ID=15703146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15987777A Granted JPS5490968A (en) 1977-12-27 1977-12-27 Semiconductor diffusion furnace reactive tube

Country Status (1)

Country Link
JP (1) JPS5490968A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54132164A (en) * 1978-04-05 1979-10-13 Toshiba Ceramics Co Device for fabricating semiconductor
JPS58194781A (ja) * 1982-05-06 1983-11-12 住友電気工業株式会社 複合セラミツク部材

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54132164A (en) * 1978-04-05 1979-10-13 Toshiba Ceramics Co Device for fabricating semiconductor
JPS58194781A (ja) * 1982-05-06 1983-11-12 住友電気工業株式会社 複合セラミツク部材

Also Published As

Publication number Publication date
JPS6145853B2 (enrdf_load_stackoverflow) 1986-10-09

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